Large area low mass IR pixel having tailored cross section

  • US 6,046,485 A
  • Filed: 04/01/1999
  • Issued: 04/04/2000
  • Est. Priority Date: 04/01/1999
  • Status: Expired due to Term
First Claim
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1. A microstructure for use as a pixel in a pixel array, comprising:

  • a plurality of connection pads structurally connected to a substrate, the connection pads further providing electrical connection to a pixel control circuit on the substrate;

    a support structure structurally and electrically attached to the plurality of connection pads and extending from the connection pads, the support structure situated above the substrate and having a predetermined cross-sectional height;

    a thermally isolated area structurally and electrically attached to the support structure, the thermally isolated area also situated above the substrate and having the predetermined cross-sectional height; and

    a responsive area attached to the thermally isolated area and substantially filling the remainder of the pixel area, the fill area having a reduced cross-sectional height, wherein the reduced cross-sectional height is less than the predetermined cross-sectional height.

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