Modular filter fan unit

• US 6,050,774 A
• Filed: 10/14/1998
• Issued: 04/18/2000
• Est. Priority Date: 10/14/1997
• Status: Expired due to Term

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Huntair Incorporated (Melrose Industries Plc)
• Inventors: LeBaron, James F.
• Primary Examiner(s): Look, Edward K.
• Assistant Examiner(s): SHANLEY, MATTHEW
• Application Number:
  US09/172,945
• Time in Patent Office: 552 Days
• Field of Search: 415/121.2, 415/169.1, 415/213.1, 415/214.1, 416/247 R, 454/187, 417/313, 417/326, 417/423.14, 417/423.1
• US Class Current: 415/121.2
• CPC Class Codes: B01D 2273/30 Means for generating a circulation of a fluid in a filtration system, e.g. using a pump or a fan
• CPC Class Codes: B01D 2279/51 in clean rooms, e.g. production facilities for electronic devices, laboratories
• CPC Class Codes: B01D 46/0005 Mounting of filtering elements within casings, housings or frames B01D46/2422 takes precedence
• CPC Class Codes: B01D 46/10 Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
• CPC Class Codes: B01D 46/88 Replacing filter elements
• CPC Class Codes: F24F 3/167 Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed air distribution by perforated walls F24F7/10

Abstract

A modular fan filter unit designed to supply process control air to mini-enclosure clean rooms. The modular fan filter unit is easy to remove, repair, and replace in the clean room environment. It has a readily accessible filter mounted across its bottom surface and an internal variable frequency drive fan. The fan pushes air through the filter into a clean room. Multiple numbers of modular fan filter units may be connected together as an array.

Claims

1. A fan filter unit, comprising:

a housing having a bottom opening;

a removable filter closing the opening;

a fan received in the housing;

a fan support received in the housing, the fan support having a horizontal section that is centrally located over the approximate midspan of the filter, and side supports sloping downwardly from opposite sides of the horizontal section, the sides cooperating to define a divergent chamber downwardly from the horizontal section toward the filter, and further, the fan is mounted to the support for drawing air into the chamber and forcing the air out through the filter, and wherein the fan filter unit is modular to allow the entire fan filter unit to be removed as a unit.

2. The fan filter unit of claim 1, wherein the fan is mounted to a lower surface of the horizontal section of the fan support, the horizontal section having an inlet opening for enabling the fan to draw air through the horizontal section, and further, the fan filter unit having an air cone received in the housing, the air cone being mounted to an upper surface of the horizontal section for delivering air into the inlet opening.

3. The fan filter unit of claim 2, wherein the fan is a variable frequency drive ("VFD") controlled fan, and further, the fan is adapted to draw air through the inlet opening of the horizontal section of the fan support, and force the air radially outwardly against the sloping sides of the fan support.

4. The fan filter unit of claim 3, including a power distribution box for controlling and adjusting the speed of the VFD controlled fan.

8. The fan filter unit of claim 1, wherein the fan is mounted to a lower surface of the horizontal section of the fan support, the horizontal section having an inlet opening for enabling the fan to draw air through the horizontal section.

9. The fan filter unit of claim 1, further comprising an air cone received in the housing, the air cone being mounted to an upper surface of the horizontal section for delivering air to the fan.

10. The fan filter unit of claim 1, wherein the fan is a variable frequency drive ("VFD") controlled fan.

11. The fan filter unit of claim 1, wherein the fan is adapted to force the air radially outward against the sloping sides of the fan support.

12. The fan filter unit of claim 1, wherein the fan is a removable plug fan.

13. The fan filter unit of claim 4, wherein the power distribution box includes at least one output power connection whereby power can be provided to an adjacent fan filter unit.

14. The fan filter unit of claim 4, wherein the power distribution box includes at least one control signal output whereby control signals can be provided to an adjacent fan filter unit.

5. A fan filter unit, comprising:

a housing having a bottom opening;

a removable filter closing the opening;

a fan received in the housing;

a fan support received in the housing, the fan support having a horizontal section that is centrally located over the approximate midspan of the filter, and side supports sloping downwardly from opposite sides of the horizontal section, the sides cooperating to define a divergent chamber downwardly from the horizontal section toward the filter, and further, the fan is mounted to a lower surface of the horizontal section of the fan support for drawing air into the chamber and forcing the air out through the filter, the horizontal section having an inlet opening for enabling the fan to draw air through the horizontal section, and further, the fan filter unit having an air cone received in the housing, the air cone being mounted to an upper surface of the horizontal section for delivering air into the inlet opening.

6. The fan filter unit of claim 5, wherein the fan is a variable frequency drive ("VFD") controlled fan, and further, the fan is adapted to draw air through the inlet opening of the horizontal section of the fan support, and force the air radially outwardly against the sloping sides of the fan support.

7. The fan filter unit of claim 6, including a power distribution box for controlling and adjusting the speed of the VFD controlled fan.