Processing chamber and method for confining plasma

• US 6,063,441 A
• Filed: 12/02/1997
• Issued: 05/16/2000
• Est. Priority Date: 12/02/1997
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chang, Mei, Johnson, Mark S., Lei, Lawrence Chung-Lai, Koai, Keith
• Primary Examiner(s): MAI, NGOCLAN THI
• Application Number:
  US08/982,727
• Time in Patent Office: 896 Days
• Field of Search: 438/656, 438/680, 438/685, 427/569, 427/579, 427/248.1, 427/255.391, 427/255.394
• US Class Current: 427/248.1
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45572 Cooled nozzles
• CPC Class Codes: C23C 16/4585 Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: H01J 37/32522 Temperature
• CPC Class Codes: H01J 37/32834 Exhausting

Abstract

A substrate processing chamber, particularly a chemical vapor deposition (CVD) chamber used both for thermal deposition of a conductive material and a subsequently performed plasma process. The invention reduces thermal deposition of the conductive material on peripheral portions of the pedestal supporting a wafer and in a pumping channel exhausting the chamber. A peripheral ring placed on the pedestal, preferably also used to center the wafer, is thermally isolated from the pedestal so that its temperature is kept substantially lower than that of the wafer. The processing chamber includes a chamber lid assembly having an isolator ring member that has a sloping surface for confirming the plasma within a processing zone of the processing chamber while the wafer is being processed therein. A method for forming a CVD layer on a wafer comprising elevating the pedestal until an upper pedestal surface of the pedestal extends above a lower edge of the isolator ring member.

Claims

1. A method for forming a CVD layer on a substrate comprising the steps of:

(a) providing a processing chamber comprising a chamber body, a pedestal movably disposed in the chamber body and including an upper pedestal surface, and a chamber lid assembly supported by the chamber body and including an isolator ring member comprising an isolator ring lip having a sloping surface terminating in a lower lip edge;

(b) disposing a substrate on said pedestal;

(c) elevating said pedestal including said substrate of step (b) until said upper pedestal surface of said pedestal extends above said lower lip edge of said isolator ring lip of said isolator ring member; and

(d) processing said substrate including contacting said substrate with a processing gas to form a CVD layer on said substrate.

2. The method of claim 1 additionally comprising heating said pedestal to a temperature less than 600°

C.

3. The method of claim 1 wherein said CVD layer comprises TiN.

4. The method of claim 2 wherein said CVD layer comprises TiN.

5. The method of claim 1 wherein said processing step (d) comprises forming a plasma with said processing gas.

6. The method of claim 2 wherein said temperature ranges from about 400°

C. to about 500°

C.

7. The method of claim 4 wherein said temperature ranges from about 400°

C. to about 500°

C.