Hard carbon thin film and method of forming the same

  • US 6,066,399 A
  • Filed: 03/19/1998
  • Issued: 05/23/2000
  • Est. Priority Date: 03/19/1997
  • Status: Expired due to Term
First Claim
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1. A hard carbon thin film arrangement comprising a hard carbon thin film having a surface and an interface opposite said surface with a thickness direction extending through said thin film from said interface to said surface, and having a graded carbon composition in which a ratio of sp2 to sp3 carbon-carbon bonding in said thin film decreases in said thickness direction from said interface to a minimum at an internal location of said thin film between said interface and said surface, and increases from said minimum at said internal location toward said surface of said thin film.

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