Micromachined vibratory rate gyroscope

• US 6,067,858 A
• Filed: 05/30/1997
• Issued: 05/30/2000
• Est. Priority Date: 05/31/1996
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Clark, William A., Juneau, Thor, Howe, Roger T.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US08/865,726
• Time in Patent Office: 1,096 Days
• Field of Search: 73/504.12, 73/504.02, 73/504.14, 73/504.15, 73/504.16, 73/514.32
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.

Claims

1. A microfabricated gyroscopic sensor, comprising:

a substrate having a first plurality of electrode teeth;

a vibratory structure including a mass a second plurality of electrode teeth projecting from the mass and a suspension system connecting the mass to the substrate, the second plurality of electrode teeth interdigited with the first plurality of electrode teeth;

a drive system to cause the vibratory structure to oscillate relative to the substrate; and

a position sensor to measure a deflection of the mass caused by a Coriolis force;

wherein the first and second pluralities of electrode teeth have thicknesses substantially greater than their widths.

2. The sensor of claim 1 wherein the suspension system includes a plurality of flexures having an aspect ratio of at least about 10:

1.

3. The sensor of claim 1 wherein the first and second pluralities of electrode teeth have an aspect ratio of at least 5:

1.

4. The sensor of claim 1 wherein gaps between the first and second pluralities of electrode teeth have an aspect ratio of at least 10:

1.