Sensing structure comprising a movable mass and a self-test structure
First Claim
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1. A sensing structure comprising:
- a movable mass positioned overlying a substrate and moving in a direction corresponding to a sensitive axis wherein said movable mass moves relative to said substrate and said movable mass comprises a first mass portion and a second mass portion disposed on opposite sides of a centerline of said movable mass wherein said centerline is substantially parallel to said sensitive axis;
a movable self-test finger protruding from said first mass portion;
a fixed self-test finger fixedly mounted to said substrate; and
wherein said movable self-test finger and said fixed self-test finger are disposed between said first mass portion and said second mass portion.
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Abstract
A sensing structure (10) formed overlying a substrate (50), for example a semiconductor substrate, has a movable mass (12) substantially split into two halves with a self-test structure disposed between the two halves. The self-test structure has a plurality of single-capacitor actuators for displacing the movable mass. Each actuator is formed by a movable finger (18) connected to the movable mass and a fixed finger (44) mounted by an anchor to the substrate. Each actuator is shielded by a fixed shield finger (42) so that all actuators force the movable mass in a common direction.
55 Citations
25 Claims
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1. A sensing structure comprising:
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a movable mass positioned overlying a substrate and moving in a direction corresponding to a sensitive axis wherein said movable mass moves relative to said substrate and said movable mass comprises a first mass portion and a second mass portion disposed on opposite sides of a centerline of said movable mass wherein said centerline is substantially parallel to said sensitive axis; a movable self-test finger protruding from said first mass portion; a fixed self-test finger fixedly mounted to said substrate; and wherein said movable self-test finger and said fixed self-test finger are disposed between said first mass portion and said second mass portion. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A sensing structure comprising:
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a movable mass disposed overlying a substrate and moving in a direction corresponding to a sensitive axis, the movable mass comprising a first mass portion and a second mass portion disposed on opposite sides of a centerline of said movable mass wherein said centerline is substantially parallel to said sensitive axis; and a fixed self-test finger disposed between said first mass portion and said second mass portion. - View Dependent Claims (9, 10, 11, 18)
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12. A sensing structure comprising:
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a movable mass disposed overlying a substrate and comprising a first mass portion and a second mass portion; and a fixed self-test finger disposed between said first mass portion and said second mass portion; a movable self-test finger protruding from said first mass portion and wherein; said movable mass moves in a direction corresponding to a sensitive axis; said first mass portion and said second mass portion are each disposed substantially symmetrically about a centerline of said movable mass and together form at least a portion of a perimeter of said movable mass wherein said centerline is substantially parallel to said sensitive axis; and said movable self-test finger and said fixed self-test finger are each disposed within said perimeter; and a fixed shield finger disposed substantially parallel to said movable self-test finger and wherein said fixed self-test finger and said movable self-test finger are disposed substantially parallel to each other to provide a single-capacitor self-test actuator. - View Dependent Claims (13, 14, 15, 16, 17)
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19. A sensing structure comprising:
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a movable mass overlying a semiconductor substrate wherein a central portion of said movable mass comprises at least one central opening, and the movable mass moving in a direction corresponding to a sensitive axis, and comprising a first mass portion and a second mass portion disposed on opposite sides of a centerline of said movable mass wherein said centerline is substantially parallel to said sensitive axis; and a plurality of fixed self-test fingers disposed inside said central opening. - View Dependent Claims (20, 21)
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22. A sensing structure comprising:
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a movable mass overlying a semiconductor substrate wherein a central portion of said movable mass comprises at least one central opening; a plurality of fixed self-test fingers disposed inside said central opening wherein said fixed self-test finders are disposed substantially parallel to a plurality of corresponding movable self-test fingers each a part of said movable mass and protruding inward towards said central opening so as to provide a plurality of single capacitor self-test actuators, and wherein said sensing structure is an acceleration sensing structure and said plurality of fixed self-test fingers is disposed substantially symmetrically about a centerline of said movable mass; and a plurality of fixed shield fingers each disposed substantially parallel to a corresponding one of said plurality of movable self-test fingers.
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23. A method of forming a sensing structure comprising:
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forming a movable mass overlying a substrate wherein said movable mass moves in a direction corresponding to a sensitive axis, said movable mass moves relative to said substrate, and said movable mass comprises a first mass portion and a second mass portion disposed on opposite sides of a centerline of said movable mass wherein said centerline is substantially parallel to said sensitive axis; forming a movable self-test finger protruding from said first mass portion and disposed between said first mass portion and said second mass portion; and forming a fixed self-test finger fixedly mounted to said substrate and disposed between said first mass portion and said second mass portion. - View Dependent Claims (24, 25)
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Specification