Method for calibrating a measured value of detecting means
First Claim
1. A calibration method for a detecting means in which a physical value, measured by the detecting means incorporated into an apparatus, is calibrated, comprising the steps of:
- prior to installation of the detecting means in the apparatus, storing a plurality of sets of data of differences between previously-known physical values inputted into the detecting means and measured values of the previously-known physical values outputted from the detecting means in correspondence with said measured values of the previously-known physical values; and
calibrating a physical value measured by the detecting means after the detecting means is incorporated into the apparatus by adding thereto a value estimated from the differences stored in the data retrieved based on the physical value to be calibrated.
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Accused Products
Abstract
There is provided a calibration method of a detecting section which is provided on a substrate incorporated into a system interconnection generator and which detects by detecting means an object to be detected or an value of the object to be detected. The calibration method comprises the steps of prior to the substrate being incorporated into the system interconnection generator, measuring by the detecting section a reference value of the object to be detected by the detecting section; storing at least one of an error with respect to the reference value measured by the measuring step and the measured value of the reference value in association with the measurement result; and after the substrate being incorporated into the system interconnection generator, outputting the measurement result of the detecting section based on at least one of the error and the measured reference value, stored by the storing step in association with the measurement result.
221 Citations
9 Claims
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1. A calibration method for a detecting means in which a physical value, measured by the detecting means incorporated into an apparatus, is calibrated, comprising the steps of:
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prior to installation of the detecting means in the apparatus, storing a plurality of sets of data of differences between previously-known physical values inputted into the detecting means and measured values of the previously-known physical values outputted from the detecting means in correspondence with said measured values of the previously-known physical values; and calibrating a physical value measured by the detecting means after the detecting means is incorporated into the apparatus by adding thereto a value estimated from the differences stored in the data retrieved based on the physical value to be calibrated. - View Dependent Claims (2)
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3. An apparatus including means for calibrating a measured value by a detecting means incorporated into the apparatus, comprising:
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storing means which stores a plurality of sets of data of differences between previously-known physical values inputted into the detecting means and measured values of the previously-known physical values outputted from the detecting means in correspondence with said measured values of the previously-known physical values prior to the detecting means being incorporated into the apparatus; and calibrating means which calibrates, based on the data stored in said storing means, a physical value measured by the detecting means after the detecting means is incorporated into the apparatus by adding thereto a value estimated from the differences stored in the data retrieved based on the physical value to be calibrated. - View Dependent Claims (4, 5, 6)
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7. A calibration method for a detecting device in which a physical value, measured by the detecting device incorporated into an apparatus, is calibrated, comprising the steps of:
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prior to installation of the detecting device in the apparatus, inputting a plurality of previously-known physical values into the detecting device; outputting measured values of the previously-known physical values from the detecting device; storing in a memory data of differences between the previously-known physical values and the measured values of the previously-known physical values in correspondence with said measured values of the previously-known physical values, wherein the number of sets of the data stored is such that non-linear approximation can be conducted between the previously-known physical values and the measured values thereof; and after installation of the detecting device in the apparatus, calibrating a physical value measured by the detecting device by adding thereto a value estimated from the differences stored in the data retrieved based on the physical value to be calibrated. - View Dependent Claims (8, 9)
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Specification