Low energy spread ion source with a coaxial magnetic filter

• US 6,094,012 A
• Filed: 11/06/1998
• Issued: 07/25/2000
• Est. Priority Date: 11/06/1998
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Leung, Ka-Ngo, Lee, Yung-Hee Yvette
• Primary Examiner(s): Bettendorf, Justin P.
• Application Number:
  US09/187,540
• Time in Patent Office: 627 Days
• Field of Search: 315/111.71, 315/111.81, 315/111.91, 250/423 R
• US Class Current: 315/111.81
• CPC Class Codes: H01J 27/18 with an applied axial magnetic field

Abstract

Multicusp ion sources are capable of producing ions with low axial energy spread which are necessary in applications such as ion projection lithography (IPL) and radioactive ion beam production. The addition of a radially extending magnetic filter consisting of a pair of permanent magnets to the multicusp source reduces the energy spread considerably due to the improvement in the uniformity of the axial plasma potential distribution in the discharge region. A coaxial multicusp ion source designed to further reduce the energy spread utilizes a cylindrical magnetic filter to achieve a more uniform axial plasma potential distribution. The coaxial magnetic filter divides the source chamber into an outer annular discharge region in which the plasma is produced and a coaxial inner ion extraction region into which the ions radially diffuse but from which ionizing electrons are excluded. The energy spread in the coaxial source has been measured to be 0.6 eV. Unlike other ion sources, the coaxial source has the capability of adjusting the radial plasma potential distribution and therefore the transverse ion temperature (or beam emittance).

Claims

1. An ion source, comprising:

a multi-cusp plasma generator having a longitudinal axis and generating a plasma having a substantially uniform axial plasma potential along the longitudinal axis and a substantially uniform radial plasma potential perpendicular to the longitudinal axis;

a coaxial magnetic filter mounted in the plasma generator and extending along the longitudinal axis, wherein ions produced outside the magnetic filter pass through the filter and are extracted therefrom.

2. The ion source of claim 1 wherein the coaxial magnetic filter comprises a plurality of spaced parallel magnetic rods.

3. The ion source of claim 2 wherein the plasma generator comprises:

a chamber;

a plurality of permanent magnets disposed about the chamber to produce a magnetic cusp field therein;

a gas inlet in the chamber;

a plasma generating element in the chamber.

4. The ion source of claim 3 wherein the plasma generating element is a dc discharge filament or an RF induction coil antenna.

5. The ion source of claim 3 wherein the chamber is cylindrical.

6. The ion source of claim 3 wherein the magnetic filter divides the chamber into an annular outer region in which a plasma is produced and a coaxial inner region into which ions from the plasma radially diffuse, and from which ions are extracted.

7. The ion source of claim 6 further comprising an extractor mounted on an open end of the chamber to extract ions from the inner region of the chamber.

8. The ion source of claim 7 wherein the extractor comprises a pair of electrodes.

9. The ion source of claim 7 further comprising a bias plate mounted in the inner region the chamber for applying a bias voltage between the bias plate and the chamber.

10. An ion source, comprising:

a cylindrical chamber;

a plurality of parallel spaced columns of permanent magnets arrayed around the lateral surface of the chamber to produce a magnetic cusp field therein;

a back plate mounted on one end of the chamber;

a plurality of permanent magnets mounted on the back plate;

a front plate mounted on the other end of the chamber;

a plurality of permanent magnets mounted on the front plate;

a gas inlet in the back plate;

a plasma generating element mounted on the back plate;

a magnetic filter mounted coaxially in the chamber and separating the chamber into an outer annular plasma generating region and a coaxial inner ion extraction region, the plasma generating element extending into the outer plasma generating region;

an ion extractor mounted on the front plate and communicating with the inner ion extraction region.

11. The ion source of claim 10 wherein the coaxial magnetic filter comprises a plurality of spaced parallel magnetic rods.

12. The ion source of claim 10 wherein the plasma generating element is a dc discharge filament or an RF induction coil antenna.

13. The ion source of claim 10 wherein the ion extractor comprises at least a first electrode.

14. The ion source of claim 10 further comprising a bias plate mounted in the inner region of the chamber for applying a bias voltage between the bias plate and the chamber.

15. The ion source of claim 11 wherein the magnetic rods are formed of copper tubes and samarium-cobalt magnets inside the copper tubes.

16. The ion source of claim 11 wherein the magnetic filter produces a magnetic field of about 50-250 Gauss.

17. A method for generating an ion beam with a low energy spread from a multi-cusp ion source comprising:

producing a coaxially extending magnetic field within the multi-cusp ion source to divide the source into an outer region and coaxial inner region;

generating a plasma in the outer region, the plasma having a substantially uniform axial plasma potential and a substantially uniform radial plasma potential, the coaxially extending magnetic field allowing ions from the plasma to diffuse radially to the inner region while preventing ionizing electrons from entering the inner region from the outer region;

extracting ions from the inner region.

18. The method of claim 17 wherein the coaxially extending magnetic field is formed by mounting a coaxially extending magnetic filter formed of a plurality of spaced parallel permanent magnetic rods in the multicusp ion source.

19. The method of claim 17 wherein the coaxially extending magnetic field has a maximum value of about 50-250 Gauss.

20. The method of claim 17 wherein the plasma is generated by dc discharge or RF induction discharge.