Oxidative cleaning method and apparatus for electron microscopes using an air plasma as an oxygen radical source

  • US 6,105,589 A
  • Filed: 01/11/1999
  • Issued: 08/22/2000
  • Est. Priority Date: 01/11/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for simultaneous cleaning of specimen chamber, specimen and stage for Scanning Electron Microscope, Transmission Electron Microscope, Scanning Electron Microprobe or other charged particle beam instruments to remove hydrocarbon contaminants by oxidation by generating oxygen radicals from air or other nitrogen/oxygen gas mixtures under vacuum conditions produced within said specimen chamber of said instruments, said method comprising the steps of:

  • a) providing means for producing said oxygen radicals by a glow-discharge plasma;

    b) providing means for temperature or power control of said glow-discharge plasma; and

    c) using said temperature and power control to minimize ionization of nitrogen and maximize oxygen radical production in said plasma.

View all claims

    Thank you for your feedback