Fixed mount wavefront sensor

• US 6,130,419 A
• Filed: 06/25/1999
• Issued: 10/10/2000
• Est. Priority Date: 07/10/1996
• Status: Expired due to Term

• Current Assignee: AMO Development LLC (Johnson & Johnson)
• Original Assignee: Amo Wavefront Sciences LLC (Johnson & Johnson)
• Inventors: Neal, Daniel R.
• Primary Examiner(s): MANUEL, GEORGE C
• Application Number:
  US09/344,063
• Time in Patent Office: 473 Days
• Field of Search: 351/200, 351/205, 351/206, 351/212, 351/246, 351/247, 250/201.9, 250/208.1, 356/121, 356/353, 356/359, 356/349, 356/351, 356/354, 356/124, 359/559, 359/566, 359/619, 359/846, 359/847, 359/848, 359/849, 359/573, 430/321
• US Class Current: 250/201.9
• CPC Class Codes: G01J 11/00 Measuring the characteristics of individual optical pulses or of optical pulse trains
• CPC Class Codes: G01J 9/00 Measuring optical phase difference devices or arrangements for controlling the phase of light beams G02F1/01; Determining degree of coherence; Measuring optical wavelength spectrometry G01J3/00
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 3/0025 Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
• CPC Class Codes: G02B 3/0056 arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085
• CPC Class Codes: G02B 3/0075 characterized by non-optical structures, e.g. having integrated holding or alignment means
• CPC Class Codes: G02B 5/1876 Diffractive Fresnel lenses; Zone plates; Kinoforms G02B5/1842, G02B5/1847 take precedence; optical systems having diffractive correction means G02B27/0037; Fresnel lenses operating by refraction G02B3/08
• CPC Class Codes: G02B 5/1885 Arranged as a periodic array

Abstract

A rigid mount and method of mounting for a wavefront sensor. A wavefront dissector, such as a lenslet array, is rigidly mounted at a fixed distance relative to an imager, such as a CCD camera, without need for a relay imaging lens therebetween.

Claims

1. A wavefront dissector mount comprising means for rigidly mounting a wavefront dissector relative to an imager at a fixed distance without a relay imaging lens, an intensifier, or any other optical element between said wavefront dissector and said imager.

2. The mount of claim 1 additionally comprising means for sealing a region between the wavefront dissector and the imager.

3. The mount of claim 2 wherein said sealing means comprises means selected from the group consisting of o-rings, epoxies, and glues.

4. The mount of claim 1 wherein said means comprises a mechanical mount connected directly to the imager.

5. The mount of claim 1 wherein said means comprises threads.

6. The mount of claim 5 additionally comprising a locking mechanism.

7. The mount of claim 1 wherein said means comprises shims.

8. The mount of claim 1 wherein said means comprises an integration of the wavefront dissector directly onto imager optics.

9. The mount of claim 1 wherein said wavefront dissector comprises a lenslet array.

10. The mount of claim 1 wherein said mount additionally operates as a heat sink between said wavefront dissector and said imager, thereby reducing distortions induced by temperature variations.

11. The mount of claim 1 wherein said mount operates to minimize distortion in imaging applications selected from the group consisting of metrology of surfaces, metrology of transmissive media, measurement of turbulence, measurement of inhomogenous media, static or dynamic measurement of surface or object deformation, electronic shuttering applications, pulsed light source applications, and high vibration applications.

12. A method of mounting a wavefront dissector, the method comprising rigidly mounting a wavefront dissector relative to an imager at a fixed distance without a relay imaging lens, an intensifier, or any other optical element between the wavefront dissector and the imager.

13. The method of claim 12 comprising sealing a region between the wavefront dissector and the imager.

14. The method of claim 13 wherein the sealing step comprises providing means selected from the group consisting of o-rings, epoxies, and glues.

15. The method of claim 12 wherein mounting comprises providing a mechanical mount connected directly to the imager.

16. The method of claim 12 wherein mounting comprises employing threads.

17. The method of claim 16 wherein mounting additionally comprises employing a locking mechanism.

18. The method of claim 12 wherein mounting comprises employing shims.

19. The method of claim 12 wherein mounting comprises integrating the wavefront dissector directly onto imager optics.

20. The method of claim 12 wherein mounting comprises mounting a lenslet array.

21. The method of claim 17 wherein the method operates to minimize distortion in imaging applications selected from the group consisting of metrology of surfaces, metrology of transmissive media, measurement of turbulence, measurement of inhomogenous media, static or dynamic measurement of surface or object deformation, electronic shuttering applications, pulsed light source applications, and high vibration applications.

22. A wavefront sensor comprising a wavefront dissector, an imager, and means for rigidly mounting the wavefront dissector relative to the imager at a fixed distance without a relay imaging lens, an intensifier, or any other optical element between said wavefront dissector and said imager.

23. The wavefront sensor of claim 22 additionally comprising means for sealing a region between the wavefront dissector and the imager.