Plasma enhancement apparatus and method for physical vapor deposition

  • US 6,139,964 A
  • Filed: 06/06/1995
  • Issued: 10/31/2000
  • Est. Priority Date: 04/22/1991
  • Status: Expired due to Fees
First Claim
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1. An article manufactured by an electric arc vapor deposition process, said article comprising:

  • (a) a substrate having a surface; and

    (b) a layer of amorphous carbon arranged on said substrate surface, said amorphous carbon being applied to said substrate surface by electric arc vapor deposition and being thin, homogeneous, dense, smooth, extremely hard, having less than one percent hydrogen.

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