Piezoelectric transducer

• US 6,140,740 A
• Filed: 12/30/1997
• Issued: 10/31/2000
• Est. Priority Date: 12/30/1997
• Status: Expired due to Term

• Current Assignee: Remon Medical Technologies Ltd. (Boston Scientific Corporation)
• Original Assignee: Remon Medical Technologies Ltd. (Boston Scientific Corporation)
• Inventors: Porat, Yariv, Tsaliah, Yoseph, Doron, Eyal
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US09/000,553
• Time in Patent Office: 1,036 Days
• Field of Search: 310/311, 310/322, 310/324, 310/334, 310/337, 310/366, 310/357-359, 310/335, 310/365, 310/316, 310/317, 310/319, 310/800
• US Class Current: 310/322
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 5/0031 Implanted circuitry
• CPC Class Codes: A61B 5/0535 Impedance plethysmography for measuring blood flow A61B5/0295
• CPC Class Codes: A61B 5/413 Monitoring transplanted tissue or organ, e.g. for possible rejection reactions after a transplant
• CPC Class Codes: A61N 1/37288 Communication to several implantable medical devices within one patient
• CPC Class Codes: G01F 1/36 the pressure or differential pressure being created by the use of flow constriction
• CPC Class Codes: G01F 1/72 Devices for measuring pulsing fluid flows
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H10N 30/302 Sensors
• CPC Class Codes: Y10S 310/80 Piezoelectric polymers, e.g. PVDF

Abstract

A miniature piezoelectric transducer element is provided, comprising; (a) a cell element having a cavity; (b) a flexible piezoelectric layer attached to the cell member, the piezoelectric layer having an external surface and an internal surface, the piezoelectric layer featuring such dimensions so as to enable fluctuations thereof at its resonance frequency upon impinging of an external acoustic wave; and (c) a first electrode attached to the external surface and a second electrode attached to the internal surface of the piezoelectric layer. At least one of the electrodes may be specifically shaped so as to provide a maximal electrical output, wherein the electrical output may be current, voltage or power. A preferred shape of the electrodes includes two cores interconnected by a connecting member. The transducer element may function as a transmitter. When used as a transmitter, the electrodes are electrically connected to an electrical circuit including a switching element for modulating the reflected acoustic wave by controllably changing the mechanical impedance of the piezoelectric layer according to the frequency of an electrical message signal arriving from an electronic member, such as a sensor. Third and fourth electrodes may be attached to the piezoelectric layer and the electrical circuit, such that the switching element alternately connects the electrodes in parallel and anti-parallel electrical connections so as to controllably change the mechanical impedance of the piezoelectric layer.

Claims

1. A transducer element for converting acoustic wave energy transmitted through an external fluid medium into electric energy, comprising:

(a) a cell member having a cavity;

(b) a substantially flexible piezoelectric layer peripherally attached to said cell member so as to isolate said cavity from the external fluid medium, said cavity containing gas and having a substantially lower acoustic impedance than said external fluid medium, a central portion of said piezoelectric layer not rigidly affixed with respect to said cavity, said piezoelectric layer having an external surface and an internal surface, said piezoelectric layer featuring such dimensions so as to enable fluctuations thereof in-and-out of said cavity at its resonance frequency upon impinging of an acoustic signal transmitted through the external fluid medium, said resonance frequency determined by the physical dimensions of said cavity and said piezoelectric layer wherein the wavelength of the acoustic signal is substantially larger than said dimensions; and

(c) a first electrode attached to said external surface and a second electrode attached to said internal surface.

2. The transducer element of claim 1, wherein said cavity is etched into a substrate.

3. The transducer element of claim 2, wherein said substrate includes an electrically insulating layer and an electrically conducting layer.

4. The transducer element of claim 3, wherein said first electrode is integrally made with a substantially thin electrically conducting layer disposed on said substrate.

5. The transducer of claim 4, wherein said substantially thin electrically conducting layer is connected to said substrate by means of a sealing connection.

6. The transducer element of claim 3, wherein said electrically insulating layer is made of silicon.

7. The transducer element of claim 3, wherein said electrically insulating layer is made of a polymeric material.

8. The transducer element of claim 5, wherein said sealing connection is made of indium.

9. The transducer element of claim 1, wherein said piezoelectric layer is made of PVDF.

10. The transducer clement of claim 1, wherein said cavity is circular in cross section.

11. The transducer element of claim 1, wherein said cavity is hexagonal in cross section.

12. The transducer element of claim 2, wherein said substrate includes a plurality of cell members.

13. The transducer element of claim 1, wherein at least one of said first and second electrodes is specifically shaped so as to provide a maximal electrical output.

14. The-transducer element of claim 13, wherein said electrical output is current.

15. The transducer element of claim 13, wherein said electrical output is voltage.

16. The transducer element of claim 13, wherein said electrical output is power.

17. The transducer element of claim 13, wherein at least one of said electrodes features first and second electrode portions interconnected by a connecting member.

18. The transducer element of claim 1, wherein said gas is of substantially low pressure.

19. The transducer element of claim 18, wherein said transducer element is used as a transmitter.

20. The transducer element of claim 18, further including a switching clement electrically connected thereto so as to controllably change the mechanical impedance of said piezoelectric layer.

44. The transducer element of claim 1, wherein said transducer is used as a sensor.

21. A transmitter element, comprising:

(a) a cell member having a cavity;

(c) a substantially flexible piezoelectric layer being peripherally attached to said cell member so as to isolate said cavity from its surroundings, and such that a central portion of said flexible piezoelectric layer is not rigidly affixed with respect to said cavity, said piezoelectric layer having an external surface and an internal surface, said piezoelectric layer featuring such dimensions so as to enable fluctuations thereof in-and-out of said cavity at its resonance frequency upon impinging of an external acoustic field; and

(c) a first electrode attached to said external surface and a second electrode attached to said internal surface, said electrodes being electrically connected to an electrical circuit, said electrical circuit including means for controllably changing the mechanical impedance of said piezoelectric layer.

22. The transmitter element of claim 21, wherein the switching frequency of said switching element equals the frequency of an electrical message signal arriving from an electronic member.

23. The transmitter element of claim 22, wherein said electronic member is a sensor.

24. The transmitter element of claim 21, wherein said switching element is for modulating a reflected acoustic wave according to a message signal arriving from an electronic component.

25. The transmit element of claim 21, further including a third electrode attached so said external surface and a fourth electrode attached to said internal surface.

26. The transmitter element of claim 25, wherein said switching element alternately connects said electrodes in parallel and anti-parallel connections, thereby controllably changing the mechanical impedance of said piezoelectric layer.

27. The transmitter element of claim 25, wherein said electrodes are electrically interconnected by means of a substantially built-in anti-parallel connection.

28. The transmitter element of claim 25, wherein said electrodes are electrically interconnected by means of a substantially built-in parallel connection.

29. The transmitter element of claim 25, wherein said switching element is an on/off switch.

30. The transmitter element of claim 25, wherein said piezoelectric layer includes first and second portions having opposite polarities.

31. The transmitter element of claim 21, wherein said transmitter element includes two cell members.

32. The transmitter element of claim 31, wherein said two cell members are electrically interconnected by means of a substantially built-in parallel connection.

33. The transmitter element of claim 31, wherein said two cell members are electrically interconnected by means of a substantially built-in anti-parallel connection.

34. The transmitter element of claim 31, wherein said switching element alternately connects said cell members in parallel and anti-parallel connections.

35. The transmitter element of claim 31, wherein said cell members have piezoelectric layers of opposite polarities.

36. The transmitter element of claim 21, wherein said cavity is covered by a two-ply piezoelectric layer including an upper layer disposed on a lower layer.

37. The transmitter element of claim 36, wherein said upper and lower layers feature opposite polarities.

38. The transmitter element of claim 36, farther including an insulating layer disposed between said upper and lower layers.

39. A method of transmitting an acoustic information, comprising:

(a) providing a substantially flexible piezoelectric layer having first and second electrodes attached thereto, said piezoelectric layer being attached to a cell member, said electrodes being electrical connected to an electrical circuit including a switching element;

(b) providing an acoustic wave for impinging on said piezoelectric layer, said acoustic wave having a reflected portion; and

(c) modulating said reflected portion of said acoustic wave by controlling the mechanical impedance of said piezoelectric layer, said controlling being effected by switching said switching element at a frequency which equals the frequency of a message signal arriving from an electronic component.

40. The method of claim 39, wherein said electronic component is a sensor.

41. The method of claim 39, further comprising:

(a) providing third and fourth electrodes attached to said piezoelectric layer, said third and fourth electrodes being electrically connected to said electrical circuit;

(b) changing the electrical connections between said electrodes by means of said switching element so as to change the mechanical impedance of said piezoelectric layer.

42. The method of claim 39, wherein said first and second electrodes are attached to a first cell member and said third and fourth electrodes are attached to a second cell member.

43. The method of claim 39, wherein said electronic component is a resistor.