Gas panel

• US 6,142,539 A
• Filed: 08/10/1999
• Issued: 11/07/2000
• Est. Priority Date: 10/30/1996
• Status: Expired due to Term

• Current Assignee: Celerity Incorporated (ICHOR Holdings, Ltd.)
• Original Assignee: Unit Instruments, Inc. (Siemens AG)
• Inventors: Redemann, Eric J., Vu, Kim N.
• Primary Examiner(s): FOX, JOHN C
• Application Number:
  US09/371,659
• Time in Patent Office: 455 Days
• Field of Search: 285/124.1, 285/125.1, 285/379, 277/600, 277/608, 277/609, 277/616, 277/630, 277/637
• US Class Current: 285/379
• CPC Class Codes: C23C 16/44 characterised by the method of coating C23C16/04 takes precedence
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: Y10T 137/4259 With separate material addition
• CPC Class Codes: Y10T 137/5109 Convertible
• CPC Class Codes: Y10T 137/5283 Units interchangeable between alternate locations
• CPC Class Codes: Y10T 137/87885 Sectional block structure
• CPC Class Codes: Y10T 137/87917 Flow path with serial valves and/or closures

Abstract

A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

Claims

1. A flange for coupling to an active site of a one-piece manifold, comprising:

a seal;

a base, said base having a retainer for coupling the seal in registration with the base, the base having a pair of gas ports comprising a gas inlet for receiving gas from an inlet bore of the one-piece manifold and a gas outlet for supplying the gas to an outlet bore of the one-piece manifold; and

a fastener retained with the base for coupling with the one-piece manifold when the base is assembled with the one-piece manifold.