Semiconductor device equipped with semiconductor circuits composed of semiconductor elements and process for production thereof
First Claim
1. A semiconductor device equipped with semiconductor circuits composed of semiconductor elements, said semiconductor elements comprising:
- a substrate having an insulating surface;
a gate electrode of multi-layer structure over said substrate,a protective film covering said substrate and the top and sides of said gate electrode,a gate insulating film covering said protective film, anda semiconductor film over said gate insulating film, said semiconductor film having at least a pair of source and drain regions and a channel region therebetween.
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Accused Products
Abstract
A semiconductor device and a process for production thereof, said semiconductor device having a new electrode structure which has a low resistivity and withstands heat treatment at 400° C. and above. Heat treatment at a high temperature (400-700° C.) is possible because the wiring is made of Ta film or Ta-based film having high heat resistance. This heat treatment permits the gettering of metal element in crystalline silicon film. Since this heat treatment is lower than the temperature which the gate wiring (0.1-5 μm wide) withstands and the gate wiring is protected with a protective film, the gate wiring retains its low resistance.
126 Citations
21 Claims
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1. A semiconductor device equipped with semiconductor circuits composed of semiconductor elements, said semiconductor elements comprising:
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a substrate having an insulating surface; a gate electrode of multi-layer structure over said substrate, a protective film covering said substrate and the top and sides of said gate electrode, a gate insulating film covering said protective film, and a semiconductor film over said gate insulating film, said semiconductor film having at least a pair of source and drain regions and a channel region therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor device equipped with semiconductor circuits composed of semiconductor elements comprising;
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a substrate having an insulating surface, a gate electrode over said substrate, a protective film covering said substrate and the top and sides of said gate electrode, a gate insulating film covering said protective film, a semiconductor film over said gate insulating film, said semiconductor film having at least a pair of source and drain regions and a channel region therebetween, an inorganic insulator in contact with said channel region, and an organic resin film in contact with at least one of said source and drain regions. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification