Semiconductor integrated circuit device and method for manufacturing the same

  • US 6,150,689 A
  • Filed: 01/13/1997
  • Issued: 11/21/2000
  • Est. Priority Date: 01/12/1996
  • Status: Expired due to Term
First Claim
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1. A semiconductor integrated circuit device comprising:

  • bit lines;

    word lines;

    memory cells each having a MISFET and a capacitor element coupled thereto, and each memory cell connected to one of said bit lines and one of said word lines,wherein each of said word lines comprises a polysilicon film, a first refractory metal film over said polysilicon film and a barrier metal film interposed between said polysilicon film and said first refractory metal film, andwherein each of said bit lines comprises a second refractory metal.

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