Method of bonding a sputtering target to a backing plate

• US 6,164,519 A
• Filed: 07/08/1999
• Issued: 12/26/2000
• Est. Priority Date: 07/08/1999
• Status: Expired due to Term

• Current Assignee: Praxair S.T. Technology, Inc. (Linde Plc)
• Original Assignee: Praxair S.T. Technology, Inc. (Linde Plc)
• Inventors: Kulkarni, Shailesh, Blanchet, Jean Pierre, Gilman, Paul S.
• Primary Examiner(s): Ryan, Patrick
• Assistant Examiner(s): STONER, KILEY SHAWN
• Application Number:
  US09/349,285
• Time in Patent Office: 537 Days
• Field of Search: 228/107, 228/122.1, 228/2.5, 228/159, 228/160
• US Class Current: 228/107
• CPC Class Codes: C23C 14/3407 Cathode assembly for sputtering apparatus, e.g. Target

Abstract

There is provided a method of forming a high strength atomic bond between a sputter target and backing plate such that the microstructural characteristics of the sputter target material obtained by prior processing is not altered by the bonding process. There is further provided a method for bonding the target to the backing plate and forming a bonded target/backing plate assembly having a greater target thickness for increased sputtering life, while maintaining the overall standard dimensions set by industry standards.

Claims

1. A method of forming a bonded sputter target/backing plate assembly, comprising the steps of:

providing a backing plate having a top bonding surface;

providing a sputter target having a bottom bonding surface of diameter less than the diameter of the top bonding surface of the backing plate;

providing a ring around the sputter target to increase the diameter of the bottom bonding surface to equal the diameter of the top bonding surface;

explosion bonding the sputter target and ring to the backing plate by accelerating at least one of the top and bottom surfaces toward each other by at least one controlled detonation to form an atomic bond at a bond interface,

whereby the microstructure and properties of the materials of the sputter target and the backing plate remain substantially unchanged by the explosion bonding step; and

machining away the ring down to the bond interface to form a peripheral flange of a predetermined thickness consisting of the backing plate for securing the bonded sputter target/backing plate assembly in a deposition chamber.

2. The method of claim 1, wherein the sputter target comprises a material selected from the group consisting of:

aluminum, titanium, tantalum, tungsten, cobalt, nickel, copper and alloys thereof.

3. The method of claim 1, wherein the backing plate comprises a material selected from the group consisting of:

aluminum, copper and metal matrix composites.

4. A method of forming a bonded sputter target/backing plate assembly, comprising the steps of:

providing a sputter target having a bottom bonding surface;

providing a backing plate having a top bonding surface equal in diameter to the bottom bonding surface of the sputter target;

explosion bonding the sputter target to the backing plate by accelerating at least one of the top and bottom surfaces toward each other by at least one controlled detonation to form an atomic bond at a bond interface,

whereby the microstructure and properties of the materials of the sputter target and the backing plate remain substantially unchanged by the explosion bonding step; and

machining away an outer ring portion of the sputter target down to a depth above the bond interface to form a peripheral flange of predetermined thickness consisting of a top portion being the sputter target and a bottom portion being the backing plate, the top and bottom portions separated by the bond interface, the flange for securing the bonded sputter target/backing plate assembly in a deposition chamber.

5. The method of claim 4, wherein the sputter target comprises a material selected from the group consisting of:

aluminum, titanium, tantalum, tungsten, cobalt, nickel, copper and alloys thereof.

6. The method of claim 4, wherein the backing plate comprises a material selected from the group consisting of:

aluminum, copper and metal matrix composites.