Liquid supplying device for providing chemical solution with a liquid level sensor

• US 6,177,874 B1
• Filed: 05/07/1998
• Issued: 01/23/2001
• Est. Priority Date: 04/04/1998
• Status: Expired due to Term

• Current Assignee: United Microelectronics Corporation
• Original Assignee: United Microelectronics Corporation
• Inventors: Huang, Kuo-Feng, Cheng, Ching-Chih, Fang, Wen-Liang, Ma, Hung-Lung
• Primary Examiner(s): Lieu, Julie
• Application Number:
  US09/074,057
• Time in Patent Office: 992 Days
• Field of Search: 340/603, 340/612, 340/618, 340/619, 250/904, 250/902, 250/577, 732/93
• US Class Current: 340/618
• CPC Class Codes: G01F 23/2925 using electrical detecting means
• CPC Class Codes: Y10S 250/902 with closed light path preset
• CPC Class Codes: Y10S 250/904 with single light guide element to guide light in a continuous path

Abstract

A liquid supplying device comprising a liquid container for storing a liquid so as to supply an external device and a liquid level sensor for detecting the liquid level. As the liquid within the liquid container is gradually used up, liquid level drops. As soon as the remaining liquid in the container drops to a predetermined amount, the liquid level sensor emits a warning signal to the operator, and the operator can then replenish the liquid in the container.

Claims

1. A liquid supplying device chemical solution, comprising:

a liquid;

a liquid container for storing the liquid;

a fiber photoelectric sensor entirely made of an optical fiber that fits into the liquid container, wherein the fiber photoelectric sensor is used for detecting the liquid level of the liquid inside the liquid container by making contact with the liquid, and then generating a detected signal when the liquid level has dropped to a predetermined residual level that exposes a tip of the optical fiber;

a capillary tube that also fits into the liquid container for conducting the liquid, wherein the tube enables the outflow of the liquid from the liquid container; and

a sheath for protecting the fiber photoelectric sensor against chemical erosion, wherein the fiber photoelectric sensor is enclosed by the sheath except that the tip is exposed to the liquid when the liquid level is higher than the tip, or an air inside the liquid container when the liquid level is dropped lower than the tip.

2. The device of claim 1, wherein the fiber photoelectric sensor is connected to an amplifier unit for amplifying the detected signal.

3. The device of claim 1, wherein the protective sheath is made from a material that includes Teflon.

4. The device of claim 1, wherein the amount of residual liquid inside the container before the fiber photoelectric sensor sends out a signal is varied by changing the vertical position of the sensor with respect to the container.

5. A liquid supplying device for providing chemical solution to a spin-on-glass, comprising:

a SOG liquid;

a liquid container for storing the SOG liquid;

a fiber photoelectric sensor that fits into the liquid container, wherein the fiber photoelectric sensor is used for detecting liquid level of the SOG liquid stored inside the liquid container by making contact with the liquid, and then generating a detected signal when the liquid level has dropped lower than a tip of the fiber photoelectric sensor;

a capillary tube that also fits into the liquid container, wherein the capillary tube is used for conducting the SOG liquid out of the liquid container; and

a Teflon sheath for protecting the fiber photoelectric sensor again chemical erosion, wherein a main body of the fiber photoelectric sensor is enclosed by the sheath, while the tip of the fiber photoelectric sensor is exposed by the sheath.