Photovoltaic device
First Claim
1. A photovoltaic device comprising:
- a substrate made of a polycrystalline material; and
a non-single-crystal semiconductor formed on said substrate;
wherein polycrystal grains having a smooth surface parallel to a principal surface of said substrate and polycrystal grains having a rough surface not parallel to the principal surface of said substrate exist in the surface of said substrate.
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Accused Products
Abstract
A photovoltaic device of the present invention has a non-single-crystal semiconductor. A layer underlying the non-single-crystal semiconductor has a polycrystalline structure. Individual grains of the polycrystal exposed in the surface of the underlying layer have smooth surfaces. The surface of the underlying layer has a step along the grain boundaries of the polycrystal, or a protrusion or recess at the grain boundaries. Alternatively, polycrystal grains having rough surfaces and polycrystal grains having smooth surfaces commonly exist in the surface of the polycrystalline layer. The polycrystalline layer may be a substrate of the photovoltaic device. The present invention, by virtue of the use of such a polycrystalline layer, provides a highly reliable and efficient thin-film photovoltaic device which enhances light absorption by the semiconductor layer and which can be produced at a high yield even at a practically adoptable low cost, while eliminating deficiencies of known arts in regard to workability, yield and durability.
50 Citations
32 Claims
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1. A photovoltaic device comprising:
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a substrate made of a polycrystalline material; and
a non-single-crystal semiconductor formed on said substrate;
wherein polycrystal grains having a smooth surface parallel to a principal surface of said substrate and polycrystal grains having a rough surface not parallel to the principal surface of said substrate exist in the surface of said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A photovoltaic device comprising.
a substrate; - and
a polycrystalline film and a non-single-crystal semiconductor which are formed on said substrate;
wherein each of the individual polycrystal grains of said polycrystalline film has a smooth surface parallel to a principal surface of said substrate, and the surface of said polycrystalline film has a step along the polycrystal grain boundary, or a protrusion or recess at the grain boundary and wherein the predominant amount of material of said polycrystalline film is at least one element selected from the group consisting of gold, silver, copper, aluminum and magnesium. - View Dependent Claims (17, 18, 19, 20)
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13. A photovoltaic device comprising:
- in sequence
a substrate;
a polycrystalline film;
a transparent conductive layer and a non-single-crystal semiconductor which are formed on said substrate;
wherein each of the individual polycrystal grains of said polycrystalline film has a smooth surface parallel to a principal surface of said substrate, and the surface of said polycrystalline film has a step along the polycrystal grain boundary, or a protrusion or recess at the grain boundary. - View Dependent Claims (14, 15)
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16. A photovoltaic device comprising:
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a substrate and;
a polycrystalline film and a non-single-crystal semiconductor which are formed on said substrate;
wherein said polycrystalline film is a transparent conductive layer andwherein each of the individual polycrystal grains of said polycrystalline film has a smooth surface parallel to a principal surface of said substrate, and the surface of said polycrystalline film has a step along the polycrystal grain boundary, or a protrusion or recess at the grain boundary.
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21. A photovoltaic device comprising:
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a substrate; and
a polycrystalline film and a non-single-crystal semiconductor;
wherein polycrystal grains having a smooth surface parallel to a principal surface of said substrate and polycrystal grains having a rough surface not parallel to the principal surface of said substrate exist in the surface of said polycrystalline film. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification