×

Beam alignment correction element assembly

  • US 6,191,897 B1
  • Filed: 02/02/1999
  • Issued: 02/20/2001
  • Est. Priority Date: 07/29/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, comprising:

  • a housing having a correction element fixedly mounted therein and moveable therewith;

    a member having a first portion and a second portion;

    a first piezo element mounted to the first portion of the member and to said housing and configured to move said housing in a first direction; and

    a second piezo element mounted to the second portion of the member and to a base, and configured to move said housing in a second direction substantially perpendicular to said first direction;

    wherein said correction element has a beam axis and said movement of said housing causes said correction element to move substantially orthogonal to said beam axis.

View all claims
  • 9 Assignments
Timeline View
Assignment View
    ×
    ×