Door guide for a wafer container

  • US 6,206,196 B1
  • Filed: 01/06/1999
  • Issued: 03/27/2001
  • Est. Priority Date: 01/06/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. An improved wafer enclosure for holding wafers, the enclosure comprising an enclosure portion with a door frame defining an open side and a door with a periphery for engaging with the door frame, the enclosure having a flexible seal between the door and door frame, the improvement comprising a plurality of rigid, abrasion resistant door guides separately formed from the door and door frame, each said door guide positioned on a portion of at least one of the door periphery and the door frame for providing an interface surface between the door periphery and the door frame, wherein each of the door guides comprises an integral resilient web portion and wherein each of the door guides are secured to the door at the door periphery by way of its respective resilient web.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×