Door guide for a wafer container

• US 6,206,196 B1
• Filed: 01/06/1999
• Issued: 03/27/2001
• Est. Priority Date: 01/06/1999
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Fluoroware, Inc. (Entegris Incorporated)
• Inventors: Krampotich, Dennis J., Nyseth, David L.
• Primary Examiner(s): BUI, LUAN KIM
• Application Number:
  US09/226,372
• Time in Patent Office: 811 Days
• Field of Search: 206/710-712, 206/454, 206/832, 118/500, 494/751, 494/791, 211/41.18, 220/796, 220/800, 220/801
• US Class Current: 206/711
• CPC Class Codes: H01L 21/67373 characterised by locking systems
• CPC Class Codes: H01L 21/67376 characterised by sealing arrangements

Abstract

A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and the enclosure. In a preferred embodiment, the door guides each comprise a first body and a second body connected to each other by a web. Each body includes a door contacting portion and a door frame contacting portion. The door frame contacting portion has a sloped segment configured to slidingly, progressively, and cooperatively engage the door frame to properly position the door within door frame during closure with minimal particle generation by such contact. In this preferred embodiment, the guide is configured to be attached onto a corner edge of a door. In this arrangement, as the door is inserted into the door frame in the z-direction, the first and second bodies exert centering forces as needed in the x and y directions on corner portions of the door. Such centering forces are provided with minimal particle generation due to low particle generating characteristics of the guides.

Claims

1. An improved wafer enclosure for holding wafers, the enclosure comprising an enclosure portion with a door frame defining an open side and a door with a periphery for engaging with the door frame, the enclosure having a flexible seal between the door and door frame, the improvement comprising a plurality of rigid, abrasion resistant door guides separately formed from the door and door frame, each said door guide positioned on a portion of at least one of the door periphery and the door frame for providing an interface surface between the door periphery and the door frame, wherein each of the door guides comprises an integral resilient web portion and wherein each of the door guides are secured to the door at the door periphery by way of its respective resilient web.

2. An improved wafer enclosure for holding wafers, the enclosure comprising an enclosure portion with a door frame defining an open side and a door with a periphery for engaging with the door frame, the enclosure having a flexible seal between the door and door frame, the improvement comprising a plurality of rigid, abrasion resistant door guides separately formed from the door and door frame, each said door guide positioned on a portion of at least one of the door periphery and the door frame for providing an interface surface between the door periphery and the door frame, wherein the door guides are comprised principally of polyetheretherketone and are further comprised of polytetrafluoroethylene.

3. An improved wafer enclosure for holding wafers, the enclosure comprising a box portion with a door frame defining an open side and a door with a periphery for engaging with the door frame, the enclosure having a flexible seal between the door and door frame, the improvement comprising a plurality of abrasion resistant door guides separately formed from the door and door frame, each said door guide having a resilient portion for snapping onto said door frame without the use of separate fasteners.

4. An improved container for holding wafers, comprising:

a box portion including a door frame;

a door with a periphery for engaging the door frame;

a plurality of attachable, rigid, abrasion resistant door guides separately formed from the door and the door frame, each said door guide positioned on a portion of at least one of the door periphery and the door frame for providing interface surfaces between the door periphery and the door frame to center the door during closure, the door guides comprising polytetrafluoroethylene and polyetheretherketone.

5. The improved container of claim 4, in which said polyetheretherketone is present in an amount of about 80 percent.

6. The improved container of claim 4, in which said polytetrafluoroethylene is present in an amount of about 20 percent.

7. An improved container for holding wafers, comprising:

a box portion including a door frame;

a door with a periphery for engaging the door frame; and

a plurality of attachable, rigid, abrasion resistant door guides separately formed from the door and the door frame, each said door guide positioned on a portion of at least one of the door periphery and the door frame for providing interface surfaces between the door periphery and the door frame to center the door during closure, each said door guide comprising first and second bodies and a web, each said first and second body comprising a contacting portion, the web connecting the first body and second body, each contacting portion including a sloped segment, said first and second body contacting portions cooperatively engageable to center the door during closure.

8. The improved container of claim 7, each said body contacting portion further including a first camming surface and a second camming surface, said first and second camming surfaces providing different rates of displacement as the door engages the door frame.

9. The improved container of claim 7, in which said web is an arcuately shaped biasing element.

10. The improved container of claim 7, in which the first and second bodies comprise about 11.8 percent polyetheretherketone and about 20 percent polytetrafluoroethylene.