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Synchronous multiplexed near zero overhead architecture for vacuum processes

  • US 6,228,773 B1
  • Filed: 04/14/1998
  • Issued: 05/08/2001
  • Est. Priority Date: 04/14/1998
  • Status: Expired due to Term
First Claim
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1. A method of continuously processing a plurality of workpieces comprising the steps of:

  • supplying radio frequency power from a common power source to one of a pair plasma sources of a corresponding pair of processing chambers, plasma treating a workpiece in a deep vacuum solely in the one processing chamber while simultaneously executing at substantially atmospheric pressure substantially all post-processing and pre-processing overhead tasks relative to plasma treating another workpiece in the other processing chamber, and then reversing the aforesaid steps by supplying power from the common power source to the other plasma source processing chamber and plasma treating the other workpiece in a deep vacuum solely therein while simultaneously executing at substantially atmospheric pressure substantially all overhead tasks relative to plasma treating a third workpiece in the one processing chamber, and continuously repeating all of the aforesaid steps in sequence.

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