Semiconductor acceleration sensor and its self-diagnosing method
First Claim
1. A semiconductor acceleration sensor in which a central board having a central contact section, and outside boards at least one of which has an outside contact section are stacked,CHARACTERIZED in that said central board has a weight near said central contact section, and said outside board having said outside contact section has a weight confronting section which confronts with said weight.
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Accused Products
Abstract
The invention provides a semiconductor acceleration sensor which is small in size, light in weight, simple in manufacture, low in manufacturing cost, and high in accuracy, and which, with a switch-on time set to a predetermined value, is stable in operation.
In a semiconductor acceleration sensor in which a central board 1 having a central contact section 11, and outside boards 2 at least one of which has an outside contact section 21 are stacked; the central board 1 has a weight 12 near the central contact section 11, and the outside board 2 having the outside contact section 21 has a weight confronting section 11 which confronts with the weight 12, for squeezed damping effect.
77 Citations
7 Claims
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1. A semiconductor acceleration sensor in which a central board having a central contact section, and outside boards at least one of which has an outside contact section are stacked,
CHARACTERIZED in that said central board has a weight near said central contact section, and said outside board having said outside contact section has a weight confronting section which confronts with said weight.
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5. A semiconductor acceleration sensor in which a central board having a central contact section, and outside boards at least one of which has an outside contact section are stacked,
CHARACTERIZED in that said central contact section and said outside contact section are welded together when said central contact section and said outside contact section brought into contact with each other.
Specification