Non-stick photoresist laminate

  • US 6,235,449 B1
  • Filed: 11/16/1999
  • Issued: 05/22/2001
  • Est. Priority Date: 11/16/1999
  • Status: Expired due to Term
First Claim
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1. A photoresist laminate comprising:

  • a substrate having first and second faces;

    a first film layer of radiation sensitive material which is soluble or dispersible in water but will harden upon sufficient exposure to radiation so as to become substantially insoluble or non-dispersible, and operatively disposed on said substrate first face;

    a second layer of a material and thickness so that it substantially prevents or minimizes sticking of said first film layer to other photoresist laminates while not significantly interfering with the radiation sensitivity thereof;

    said second layer on the opposite side of said first film layer from said substrate;

    a membrane support layer between and adhering to said substrate and said first film layer and engaging both said substrate and said first film layer; and

    wherein said first film layer has a thickness of about 0.002-0.009 inches, said substrate has a thickness of about 0.002-0.003 inches, and said second layer has a thickness of about 0.0001-0.0002 inches.

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