Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images

• US 6,242,734 B1
• Filed: 09/08/2000
• Issued: 06/05/2001
• Est. Priority Date: 07/28/1994
• Status: Expired due to Term

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Lee, John R.
• Application Number:
  US09/659,023
• Time in Patent Office: 270 Days
• Field of Search: 250/234, 250/235, 250/236, 250/216, 250/306, 250/307, 250/310, 250/311, 356/373, 356/375, 356/376, 380/286, 380/289, 380/291, 345/431, 345/150, 345/151, 345/152, 345/153, 345/112
• US Class Current: 250/234
• CPC Class Codes: G01Q 30/02 Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• CPC Class Codes: G01Q 60/02 Multiple-type SPM, i.e. involving more than one SPM techniques
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18
• CPC Class Codes: G03F 1/84 Inspecting
• CPC Class Codes: G03F 7/704 Scanned exposure beam, e.g. raster-, rotary- and vector scanning mask projection exposure involving relative movement of patterned beam and workpiece during imaging G03F7/70358
• CPC Class Codes: G03F 7/70616 Monitoring the printed patterns
• CPC Class Codes: G11B 5/232 Manufacture of gap
• CPC Class Codes: G11B 5/3116 Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks G11B5/3113, G11B5/245 take precedence
• CPC Class Codes: Y10S 977/85 Scanning probe control process
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property

Abstract

A scanning probe microscope assembly and corresponding method for making confocal, spectrophotometric, near-field, and scanning probe measurements and forming associated images from the measurements.

Claims

1. A computer readable memory for directing a computer that is connected to a display and a pointing device to process parameter associated image data, the parameter associated image data representing a parameter associated image associated with a parameter and including data points with values for the parameter, the computer readable memory comprising:

a color mapping routine stored thereon and configured to;

generate color mapping tool image data in response to the object associated image data, the color mapping tool image data representing an image of a color mapping tool that includes (i) a histogram of the values, (ii) value range identifying cursors, (iii) a color strip of colors, and (iv) color range identifying cursors, and

generate a color mapping of a specific range of the colors in the color strip to a specific range of the values in the histogram when (i) the value range identifying cursors are manipulated with the pointing device to identify the specific range of values, and (ii) the color range identifying cursors are manipulated with the pointing device to identify the specific range of colors; and

a data formatting routine stored thereon and configured to;

format the color mapping tool image data for display of the image of the color mapping tool on the display; and

format the parameter associated image data for display of the parameter associated image on the display by assigning colors to the data points of the parameter associated image data according to the color mapping.

2. A computer readable memory as claimed in claim 1 wherein:

the color strip is a magnifying color strip and the color range identifying cursors are magnifying color range identifying cursors;

the color mapping tool further includes (v) a base color strip of a range of colors, and (vi) base color range identifying cursors;

the color mapping tool routine is further configured to use a specific range of the colors in the base color strip as the colors of the magnifying color strip when the base color range identifying cursors are manipulated with the pointing device to identify the specific range of the colors in the base color strip.

3. A computer readable memory as claimed in claim 1 wherein the color strip comprises large ranges of light colors that are separated at equal distances by a small range of dark colors.

4. A computer readable memory as claimed in claim 1 wherein each individual color of the colors of the color strip is a darkened version of the individual color that is below another color that is below a lightened version of the individual color.

5. A method of processing parameter associated image data with a computer that is connected to a display and a pointing device, the parameter associated image data representing a parameter associated image associated with a parameter and including data points having values for the parameter, the method comprising the steps of:

generating color mapping tool image data in response to the object associated image data, the color mapping tool image data representing an image of a color mapping tool that includes (i) a histogram of the values, (ii) value range identifying cursors, (iii) a color strip of colors, and (iv) color range identifying cursors, and

generating a color mapping of a specific range of the colors in the color strip to a specific range of the values in the histogram when (i) the value range identifying cursors are manipulated with the pointing device to identify the specific range of values, and (ii) the color range identifying cursors are manipulated with the pointing device to identify the specific range of colors;

formatting the color mapping tool image data for display of the image of the color mapping tool;

formatting the parameter associated image data for display of the image associated with the parameter by assigning colors to the data points of the parameter associated image data according to the color mapping; and

displaying the color mapping tool on the display in response to the formatted color mapping tool image data; and

displaying the parameter associated image on the display with the assigned colors in response to the formatted parameter associated image data.

6. A method as claimed in claim 5 wherein:

the color strip is a magnifying color strip and the color range identifying cursors are magnifying color range identifying cursors;

the color mapping tool further includes (v) a base color strip of a range of colors, and (vi) base color range identifying cursors;

the method further comprises the step of using a specific range of the colors in the base color strip as the colors of the magnifying color strip when the base color range identifying cursors are manipulated with the pointing device to identify the specific range of the colors in the base color strip.

7. A method as claimed in claim 5 wherein the color strip comprises large ranges of light colors that are separated at equal distances by a small range of dark colors.

8. A method as claimed in claim 5 wherein each individual color of the colors of the color strip is a darkened version of the individual color that is below another color that is below a lightened version of the individual color.