Radiation imaging device with an array of image cells

  • US 6,248,990 B1
  • Filed: 10/10/1997
  • Issued: 06/19/2001
  • Est. Priority Date: 10/15/1996
  • Status: Expired due to Term
First Claim
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1. A semiconductor imaging device including an imaging substrate comprising an image cell array of detector cells, each detector cell corresponding to an individual pixel of said image cell array, and which directly generate charge in response to incident high energy radiation, and a counting substrate containing an array of image cell circuits, each image cell circuit being associated with a respective detector cell, said image cell circuit comprising counting circuitry coupled to said respective detector cell, and configured to count plural radiation hits incident on said respective detector cell, wherein the counting substrate is directly connected to the imaging substrate by bump-bonds.

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