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System and method for providing RF power to a load

  • US 6,255,635 B1
  • Filed: 07/10/1998
  • Issued: 07/03/2001
  • Est. Priority Date: 07/10/1998
  • Status: Expired due to Term
First Claim
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1. A radio frequency (RF) power supply for providing RF power to a tank circuit coupled to an output of the RF power supply, comprising:

  • a direct current (DC) voltage source;

    an amplifier, coupled to said DC voltage source, to provide an alternating voltage to the tank circuit;

    a frequency controller, coupled to said amplifier, to control a frequency of said alternating voltage provided by said amplifier; and

    a sensor, coupled to the tank circuit and to said frequency controller, comprising a current sensor that measures current flowing into the tank circuit and a voltage sensor that measures a voltage across the tank circuit, wherein said sensor provides to said frequency controller a signal representative of the admittance of the tank circuit, and said frequency controller uses said signal representative of the admittance of the tank circuit to modify said frequency of said alternating voltage so that said frequency of said alternating voltage tracks a resonant frequency of the tank circuit.

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