Apparatus and method for routing power and ground lines in a ink-jet printhead

• US 6,260,952 B1
• Filed: 04/22/1999
• Issued: 07/17/2001
• Est. Priority Date: 04/22/1999
• Status: Expired due to Term

• Current Assignee: HP Inc.
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Beck, Jeffery Steven, Feinn, James A.
• Primary Examiner(s): Barlow, John
• Assistant Examiner(s): Brooke, Michael S.
• Application Number:
  US09/296,943
• Time in Patent Office: 817 Days
• Field of Search: 347/50, 347/58, 347/63, 347/64
• US Class Current: 347/50
• CPC Class Codes: B41J 2/14072 Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
• CPC Class Codes: B41J 2/14129 Layer structure
• CPC Class Codes: B41J 2/1603 of the front shooter type
• CPC Class Codes: B41J 2/1623 bonding and adhesion

Abstract

An ink-jet printhead having a thin film substrate, the substrate including a plurality of thin film layers including a gold thin film layer overlying a tantalum thin film layer, an underlying passivation layer and an aluminum thin film layer underlying the passivation layer. A portion of the substrate is disposed adjacent an outer edge thereof and an ink barrier layer overlies the thin film substrate, the barrier layer having a first edge. The substrate portion extends beyond the barrier layer first edge. A plurality of bond pads is disposed on the substrate portion. Power and ground traces are coupled to a respective bond pad and are dropped through vias in the substrate portion to the thin film aluminum layer underlying the passivation layer. The traces are returned through vias to the gold thin film layer at a location separated from the barrier first edge. The gold and tantalum material between the vias is removed thereby providing a region in the printhead wherein the barrier layer directly adheres to the passivation layer.

Claims

1. An ink-jet printhead, comprising:

a thin film substrate, said substrate including a plurality of thin film layers, said plurality including a passivation layer and an electrically conductive thin film layer underlying said passivation layer;

an ink barrier layer overlying said thin film substrate, said ink barrier layer defining ink chambers and ink channels, said ink barrier layer having a peripheral edge, said substrate further including a substrate portion extending beyond said ink barrier layer peripheral edge;

a bond pad disposed on said substrate portion adjacent said ink barrier layer peripheral edge; and

means for coupling electrically said bond pad to said electrically conductive thin film layer at a location within said substrate portion.

2. The ink-jet printhead according to claim 1, wherein said means for coupling includes a via.

3. The ink-jet printhead according to claim 1, wherein said means for coupling includes a plurality of vias.

4. The ink-jet printhead according to claim 2, wherein said via includes tantalum.

5. The ink-jet printhead according to claim 3, wherein said electrically conductive thin film layer comprises a plurality of aluminum traces.

6. The ink-jet printhead according to claim 1, wherein said thin film substrate includes a plurality of electrically conductive traces.

7. The ink-jet printhead according to claim 6, wherein said plurality of electrically conductive traces includes power lines and ground lines.

8. The ink-jet printhead according to claim 1, wherein said passivation layer includes silicon.

9. The ink-jet printhead according to claim 1, wherein said passivation layer includes silicon carbide and silicon nitride.

10. The ink-jet printhead according to claim 1, wherein said thin film substrate includes a second electrically conductive thin film layer.

11. The ink-jet printhead according to claim 1, wherein one of said plurality of thin film layers is selected from the group consisting of aluminum/copper and tantalum/aluminum.

12. The ink-jet printhead according to claim 1, including a region adjacent said ink barrier layer peripheral edge where said ink barrier layer directly adheres to said passivation layer.

13. A method of producing an ink-jet printhead, comprising the steps of:

providing a thin film substrate, said substrate including a plurality of thin film layers including a passivation layer and electrically conductive thin film layers, at least one of said electrically conductive thin film layers underlying said passivation layer, said electrically conductive thin film layers forming electrically conductive traces, an ink barrier layer overlying said thin film substrate, said ink barrier layer defining ink chambers and ink channels, said ink barrier layer having a peripheral edge, said substrate further including a substrate portion extending beyond said ink barrier layer peripheral edge, and a plurality of bond pads disposed on said substrate portion adjacent said ink barrier layer peripheral edge; and

coupling said electrically conductive thin film layers to said plurality of bond pads, thereby routing electric current under said passivation layer.

14. The method according to claim 13, wherein said electrically conductive traces include power and ground traces.

15. The method according to claim 13, including bonding said ink barrier layer peripheral edge directly to said passivation layer.

16. The method according to claim 13, wherein said coupling step includes providing a plurality of vias.

17. The method according to claim 13, wherein said coupling step includes providing a plurality of vias each one of said plurality of vias being comprised of tantalum.

18. The method according to claim 13, wherein said providing a thin film substrate includes the steps of providing a thin film layer of gold overlying said passivation layer and coupling at least one of said electrically conductive thin film layers underlying said passivation layer to said gold layer at a location separated from said ink barrier layer peripheral edge.

19. The method according to claim 18, wherein said coupling includes using a via to couple electrically said electrically conductive layer to said gold thin film layer.