Multi-axial angular velocity sensor

  • US 6,282,956 B1
  • Filed: 10/13/1999
  • Issued: 09/04/2001
  • Est. Priority Date: 12/29/1994
  • Status: Expired due to Fees
First Claim
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1. An angular velocity sensor for detecting an angular velocity component about a Z-axis in an XYZ three-dimensional coordinate system, the sensor comprising:

  • an oscillator having mass;

    a sensor casing for accommodating the oscillator therewithin;

    a flexible member for connecting the oscillator to the sensor casing so that the oscillator can be moved with respect to, the sensor casing with at least a degree of freedom along an XY-plane in the coordinate system;

    excitation means for oscillating the oscillator linearly in the X-axis direction; and

    displacement detecting means for detecting a displacement of the oscillator in a Y-axis direction so that an angular velocity component about the Z-axis can be obtained based on the detected displacement.

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