Frequency tunable resonant scanner with auxiliary arms

  • US 6,285,489 B1
  • Filed: 08/05/1999
  • Issued: 09/04/2001
  • Est. Priority Date: 08/05/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A microelectromechanical scanner, comprising:

  • a substrate;

    an oscillatory body carried by the substrate and coupled to the substrate for periodic movement along a movement path by a set of primary arms;

    an actuator coupled to the oscillatory body and configured to drive the oscillatory body along the movement path;

    a first auxiliary arm separate from the primary arms and interposed between the oscillatory body and the substrate, the auxiliary arm being configured to provide an auxiliary force that opposes the movement of the oscillatory body along the movement path; and

    a gimbal ring interposed between the oscillatory body and the substrate, the gimbal ring being configured to support the oscillatory body, the gimbal ring further being coupled to the substrate in a manner that permits pivoting of the gimbal ring about a first pivot axis, wherein the auxiliary arm is coupled between the oscillatory body and the gimbal ring.

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