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Methods for microdispensing patterened layers

  • US 6,306,594 B1
  • Filed: 11/17/1998
  • Issued: 10/23/2001
  • Est. Priority Date: 11/14/1988
  • Status: Expired due to Fees
First Claim
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1. A method of forming a patterned layer on a substantially planar surface, comprising(a) microdispensing, at a predetermined location, an amount of a photoformable matrix onto said planar surface sufficient to cover a predetermined area having a defined perimeter and to extend beyond said area and perimeter, forming a microdispensed matrix, wherein the area covered by the microdispensed matrix is less than the entire area of the planar surface;

  • (b) drying said microdispensed matrix;

    (c) aligning said microdispensed matrix with a mask of the predetermined area and defined perimeter at the predetermined location to form an aligned matrix;

    (d) exposing said aligned matrix to radiation to form an exposed matrix; and

    (e) developing said exposed matrix to remove excess microdispensed photoformable matrix, such that a patterned layer is formed at the predetermined location, said patterned layer having the predetermined area and defined perimeter.

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