Force detector and acceleration detector and method of manufacturing the same

  • US 6,314,823 B1
  • Filed: 07/12/2000
  • Issued: 11/13/2001
  • Est. Priority Date: 09/20/1991
  • Status: Expired due to Fees
First Claim
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1. A force detector comprising:

  • a stable member fixed to a detector casing;

    a central member locating adjacent to said stable member with a space;

    an intermediate member locating around said central member and connected to said central member;

    a peripheral member locating around said intermediate member and fixing said intermediate member to said stable member;

    a fixed electrode operatively on said stable member; and

    a displacement electrode operatively on said central member;

    wherein said intermediate member has flexibility to resiliently support said central member so that said central member moves when force is applied; and

    wherein said fixed electrode is opposite to said displacement electrode to constitute a capacitance element so that said force is detected based on a capacitance value of said capacitance element.

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