Electromagnetic alignment and scanning apparatus

  • US 6,323,935 B1
  • Filed: 01/14/2000
  • Issued: 11/27/2001
  • Est. Priority Date: 06/27/1994
  • Status: Expired due to Term
First Claim
Patent Images

1. A microlithographic system for exposing a pattern of a mask onto an object, comprising:

  • an exposure device disposed between said mask and said object to expose said pattern onto said object;

    a stage that moves while holding one of said mask and said object, the stage having a first reflective portion along a first direction;

    a first drive device connected to said stage to move said stage in the first direction;

    a position detector having a first interferometer system that cooperates with the first reflective portion to detect a position of the stage; and

    a balancing portion having a moving member along the first direction that moves in a direction opposite to the direction of movement of said stage without holding either said mask or said object, said moving member being heavier than said entire stage having the first reflective portion, and a length of the moving member being longer than a length of the first reflective portion.

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