Seal configuration for use with a motor drive assembly in a microelectronic workpiece processing system

  • US 6,334,453 B1
  • Filed: 02/14/2000
  • Issued: 01/01/2002
  • Est. Priority Date: 02/14/2000
  • Status: Expired due to Term
First Claim
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1. An apparatus for use in processing a microelectronic workpiece, the apparatus comprising:

  • a processing bowl defining a processing chamber;

    a motor drive assembly connected to drive one or more components disposed in the processing chamber, the motor drive assembly comprising a motor, a shaft assembly connected to be driven by the motor about an axis of rotation, the shaft assembly having expulsion threads at an end thereof that is proximate the processing chamber; and

    a chamber forming member substantially surrounding the expulsion threads at the end of the shaft assembly proximate the processing chamber to form an expulsion chamber about at least a portion of the expulsion threads, rotation of the expulsion threads as the shaft assembly is driven by the motor thereby assisting in preventing foreign materials from entering the motor along the shaft assembly.

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