Mask identification database server

  • US 6,351,684 B1
  • Filed: 09/19/2000
  • Issued: 02/26/2002
  • Est. Priority Date: 09/19/2000
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for tracking the movement of masks used in a wafer processing facility, the masks being moved in mask pods, the method comprising:

  • generating a mask data set for each mask that includes information on a mask identification code cross-referenced to a pod identification code;

    storing the mask data sets in a computer arrangement; and

    updating the mask data sets in the computer arrangement to include a facility location identification code as each mask moves to a subsequent location during wafer processing.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×