Method of manufacturing SOI wafer with buried layer

• US 6,365,488 B1
• Filed: 03/05/1998
• Issued: 04/02/2002
• Est. Priority Date: 03/05/1998
• Status: Expired due to Term

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Liao, Chungpin
• Primary Examiner(s): FOURSON III, GEORGE R
• Application Number:
  US09/035,057
• Time in Patent Office: 1,489 Days
• Field of Search: 438/406, 438/455, 438/456, 438/458, 438/459, 438/FOR.222, 438/FOR.105, 148/DIG.12
• US Class Current: 438/406
• CPC Class Codes: H01L 21/84 the substrate being other than a semiconductor body, e.g. being an insulating body
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688

Abstract

A method of forming a silicon-on-insulator device having a buried layer is described. Ions are implanted into a first semiconductor substrate where it is not covered by a photoresist mask to form implanted regions. Alternatively, a silicide layer over the first semiconductor substrate is patterned to leave silicide regions. A first oxide layer is formed overlying the first semiconductor substrate whereby the implanted regions or the silicide regions form the buried layer structure. A second oxide layer is formed overlying a second semiconductor substrate. The first and second oxide layers are bonded together to form the wafer, using either the bond and etch back or the Unibond™ method to complete formation of an silicon-on-insulator wafer having a buried layer structure in the fabrication of an integrated circuit.

Claims

1. A method of forming an integrated circuit comprising:

providing a photoresist mask overlying a first semiconductor substrate;

implanting ions into said first semiconductor substrate where it is not covered by said photoresist mask to form implanted regions;

forming a first oxide layer overlying said first semiconductor substrate whereby said implanted regions form a buried layer structure;

forming a second oxide layer overlying a second semiconductor substrate;

bonding said first and said second oxide layers together to form a wafer;

etching back said first semiconductor substrate to form the silicon layer of a silicon-on-insulator wafer to complete formation of said silicon-on-insulator wafer having a buried layer structure; and

thereafter forming semiconductor device structures in and on said silicon layer wherein at least one of said semiconductor device structures contacts said buried layer through an opening in said silicon layer to complete fabrication of said integrated circuit.

2. The method according to claim 1 wherein said step of implanting ions into said first semiconductor substrate comprises implanting ions with a dosage of 1 E 12 to 1 E 14 atoms/cm² at an energy of between about 30 and 200 KeV.

3. The method according to claim 1 wherein said first oxide layer has a thickness of between about 500 and 10,000 Angstroms.

4. The method according to claim 1 wherein said second oxide layer has a thickness of between 0 and about 10,000 Angstroms.

5. The method according to claim 1 wherein said step of bonding together said first and second oxide layers comprises hydrophilic bonding at room temperature.

6. The method according to claim 1 wherein after said step of etching back said first semiconductor substrate, the thickness of said first semiconductor substrate remaining overlying said buried layer structure is between about 500 and 6000 Angstroms.

7. A method of forming an integrated circuit comprising:

providing a silicide layer overlying a first semiconductor substrate;

forming a photoresist mask overlying said silicide layer;

etching away said silicide layer where it is not covered by said photoresist mask to leave silicide regions overlying said first semiconductor substrate;

forming a first oxide layer overlying said silicide regions whereby said silicide regions form a buried layer structure;

forming a second oxide layer overlying a second semiconductor substrate;

bonding said first and said second oxide layers together to form a wafer;

etching back said first semiconductor substrate to form the silicon layer of a silicon-on-insulator wafer to complete formation of a silicon-on-insulator wafer having a buried layer structure;

thereafter forming a conductive plug through an opening in said silicon layer to said buried layer; and

forming a contact overlying said silicon layer to said conductive plug to complete said integrated circuit.

8. The method according to claim 7 wherein said silicide layer comprises tungsten silicide.

9. The method according to claim 7 wherein said silicide layer comprises titanium silicide.

10. The method according to claim 7 wherein said silicide layer comprises molybdenum silicide.

11. The method according to claim 7 wherein said silicide layer has a thickness of between about 100 and 1000 Angstroms.

12. The method according to claim 7 wherein said first oxide layer has a thickness of between about 500 and 10,000 Angstroms.

13. The method according to claim 7 wherein said second oxide layer has a thickness of between 0 and about 10,000 Angstroms.

14. The method according to claim 7 wherein said step of bonding together said first and second oxide layers comprises hydrophilic bonding at room temperature.

15. The method according to claim 7 wherein after said step of etching back said first semiconductor substrate, the thickness of said first semiconductor substrate remaining overlying said buried layer structure is between about 500 and 6000 Angstroms.

16. A method of forming a bipolar integrated circuit comprising:

implanting hydrogen atoms into a first semiconductor substrate to form a wafer split level within said first semiconductor substrate;

forming a photoresist mask overlying said first semiconductor substrate;

implanting ions into said first semiconductor substrate where it is not covered by said photoresist mask to form implanted regions;

forming a first oxide layer overlying said first semiconductor substrate whereby said implanted regions form a buried layer structure;

forming a second oxide layer overlying a second semiconductor substrate;

bonding said first and said second oxide layers together to form a wafer;

removing most of said first semiconductor substrate at said wafer split level;

polishing said first semiconductor substrate remaining to form the silicon layer of a silicon-on-insulator wafer to complete formation of a silicon-on-insulator wafer having said buried layer structure;

thereafter forming a collector plug through an opening in said silicon layer to said buried layer;

forming a base region within said silicon layer;

forming an emitter within said base region;

forming first contacts overlying said silicon layer contacting said emitter and said collector; and

forming second contacts through an insulating layer to said first contacts to complete said bipolar integrated circuit.

17. The method according to claim 16 wherein said first semiconductor substrate remaining has a thickness of between about 500 and 2000 Angstroms.

18. The method according to claim 16 wherein said step of implanting ions into said first semiconductor substrate comprises implanting ions with a dosage of 1 E 12 to 1 E 14 atoms/cm² at an energy of between about 30 and 200 KeV.

19. The method according to claim 16 wherein said first oxide layer has a thickness of between about 1000 and 4000 Angstroms.

20. The method according to claim 16 wherein said second oxide layer has a thickness of between 0 and about 4000 Angstroms.

21. The method according to claim 16 wherein said step of bonding together said first and second oxide layers comprises hydrophilic bonding at room temperature.

22. A method of forming a silicon-on-insulator wafer having a buried layer structure in the fabrication of an integrated circuit comprising:

planting a wafer split level within a first semiconductor substrate using hydrogen atom implantation;

depositing a silicide layer overlying said first semiconductor substrate;

forming a photoresist mask overlying said silicide layer;

etching away said silicide layer where it is not covered by said photoresist mask to leave silicide regions overlying said first semiconductor substrate;

forming a first oxide layer overlying said first semiconductor substrate and said silicide regions whereby said silicide regions form said buried layer structure;

forming a second oxide layer overlying a second semiconductor substrate;

bonding said first and said second oxide layers together to form said wafer;

removing most of said first semiconductor substrate by splitting the wafer at said wafer split level formed by said hydrogen atom implantation;

polishing said first semiconductor substrate remaining to complete said formation of said silicon-on-insulator wafer having said buried layer structure; and

thereafter forming semiconductor device structures in and on said first semiconductor substrate wherein at least one of said semiconductor device structures contacts said buried layer through an opening in said first semiconductor substrate to complete fabrication of said integrated circuit.

23. The method according to claim 22 wherein said first semiconductor substrate remaining has a thickness of between about 500 and 2000 Angstroms.

24. The method according to claim 22 wherein said silicide layer comprises one of the group containing tungsten silicide, titanium silicide, and molybdenum silicide.

25. The method according to claim 22 wherein said silicide layer has a thickness of between about 100 and 1000 Angstroms.

26. The method according to claim 22 wherein said first oxide layer has a thickness of between about 1000 and 4000 Angstroms.

27. The method according to claim 22 wherein said second oxide layer has a thickness of between 0 and about 4000 Angstroms.

28. The method according to claim 22 wherein said step of bonding together said first and second oxide layers comprises hydrophilic bonding at room temperature.