Hex packed two dimensional ultrasonic transducer arrays
First Claim
Patent Images
1. An ultrasonic array transducer for scanning three dimensional volumes comprising:
- a two dimensional array of a plurality of rows of rectilinear transducer elements, wherein odd-numbered rows are aligned with each other, even-numbered rows are aligned with each other, and adjacent rows are offset from each other, wherein said transducer elements are operated in the k31 mode, and wherein said transducer elements include electrodes formed on one or more sides of said elements which extend substantially from a top emitting surface of the element to a bottom surface of the element.
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Abstract
A two dimensional ultrasonic transducer array suitable for three dimensional phased array scanning is formed of hexagonally close packed transducer elements. In a preferred embodiment the transducer elements have a rectilinear shape, allowing the array to be fabricated with conventional dicing saw processes.
93 Citations
25 Claims
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1. An ultrasonic array transducer for scanning three dimensional volumes comprising:
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a two dimensional array of a plurality of rows of rectilinear transducer elements, wherein odd-numbered rows are aligned with each other, even-numbered rows are aligned with each other, and adjacent rows are offset from each other, wherein said transducer elements are operated in the k31 mode, and wherein said transducer elements include electrodes formed on one or more sides of said elements which extend substantially from a top emitting surface of the element to a bottom surface of the element.
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2. An ultrasonic array transducer for scanning three dimensional volumes comprising:
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a two dimensional array of a plurality of rows of rectilinear transducer elements, wherein odd-numbered rows are aligned with each other, even-numbered rows are aligned with each other, and adjacent rows are offset from each other, wherein said elements are separated by kerf cuts, and wherein the cut spacing in one direction is approximately {square root over (3)}/2 of the cut spacing in the orthogonal direction.
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3. An ultrasonic array transducer for scanning three dimensional volumes comprising:
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a two dimensional array of a plurality of rows of rectilinear transducer elements, wherein odd-numbered rows are aligned with each ether, even-numbered rows are aligned with each other, and adjacent rows are offset from each other, wherein said elements are separated by kerf cuts, wherein said kerf cuts comprise straight line kerf cuts extending across said array in two orthogonal directions, and wherein the kerf cuts extending in one of said two directions are filled with an electrically conductive material, and wherein the kerf cuts extending in the other of said two directions are filled with an electrically nonconductive material.
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4. An ultrasonic array transducer for scanning three dimensional volumes comprising:
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a two dimensional array of a plurality of rows of rectilinear transducer elements, wherein odd-numbered rows are aligned with each other, even-numbered rows are aligned with each other, and adjacent rows are offset from each other, wherein each of said elements is formed of at least two subelements. - View Dependent Claims (10, 11)
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5. An ultrasonic array transducer for scanning three dimensional volumes comprising:
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a two dimensional array of a plurality of rows of rectilinear transducer elements, wherein odd-numbered rows are aligned with each other, even-numbered rows are aligned with each other, and adjacent rows are offset from each other, wherein said transducer elements are operated in the k31 mode, and wherein said transducer elements include electrodes formed of a conductive filler material located in one or more kerfs of said array. - View Dependent Claims (7, 8)
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6. A two dimensional ultrasonic array transducer comprising:
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a plurality of rectilinear ultrasonic transducer elements extending in at least two dimensions which define a transmitting surface, said elements being separately actuateable in said at least two dimensions, and wherein said elements are organized as a hexagonal packing of elements, wherein said transducer elements are operated in the k31 mode, and wherein said transducer elements include electrodes formed of a conductive filler material located in one or more kerfs of said array.
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9. A two dimensional ultrasonic array transducer comprising:
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a plurality of rectilinear ultrasonic transducer elements extending in at least two dimensions which define a transmitting surface, said elements being separately actuateable in said at least two dimensions, and wherein said elements are organized as a hexagonal packing of elements, wherein each of said elements is formed of at least two subelements.
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12. A two dimensional ultrasonic array transducer comprising:
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a plurality of rectilinear ultrasonic transducer elements extending in at least two dimensions which define a transmitting surface, said elements being separately actuateable in said at least two dimensions, and wherein said elements are organized as a hexagonal packing of elements, wherein said transducer elements are operated in the k31 mode, wherein said transducer elements include electrodes formed on one or more sides of said elements which extend substantially from a top emitting surface of the element to a bottom surface of the element.
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13. A two dimensional ultrasonic array transducer comprising:
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a plurality of rectilinear ultrasonic transducer elements extending in at least two dimensions which define a transmitting surface, said elements being separately actuateable in said at least two dimensions, and wherein said elements are organized as a hexagonal packing of elements, wherein said elements are separated by kerf cuts, and wherein the cut spacing in one direction is approximately {square root over (3)}/2 of the cut spacing in the orthogonal direction.
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14. A two dimensional ultrasonic array transducer comprising:
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a plurality of rectilinear ultrasonic transducer elements extending in at least two dimensions which define a transmitting surface, said elements being separately actuateable in said at least two dimensions, and wherein said elements are organized as a hexagonal packing of elements, wherein said elements are separated by kerf cuts, wherein said kerf cuts comprise straight line kerf cuts extending across said array in two orthogonal directions, and wherein the kerf cuts extending in one of said two directions are filled with an electrically conductive material, and wherein the kerf cuts extending in the other of said two directions are filled with an electrically nonconductive material. - View Dependent Claims (15, 16, 17)
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18. An ultrasonic array transducer for scanning a three dimensional volume comprising:
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an array of piezoelectric transducer elements operating in the k31 mode and extending in at least two dimensions, ones of said elements being individually actuateable and forming a polygonal transducer aperture of six or more sides, wherein said transducer elements are formed of two or more subdiced elements.
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19. A two dimensional ultrasonic array transducer comprising a plurality of rows of rectilinear transducer elements, the transducer elements in each row being staggered in position with respect to the transducer elements in adjacent rows, with the centers of two elements in one row and the center of an adjacent element in an adjacent row forming a plurality of triangles extending in said two dimensions,
wherein said triangles are equilateral triangles.
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21. A two dimensional ultrasonic array transducer comprising a plurality of transducer elements extending in at least two dimensions which define an array aperture, said elements exhibiting a maximum pitch which is not greater than approximately λ
- /2 and a maximum interelement spacing which is not greater than approximately λ
/{square root over (3)}. - View Dependent Claims (22, 23, 24, 25)
- /2 and a maximum interelement spacing which is not greater than approximately λ
Specification