High fill factor bolometer array

• US 6,392,232 B1
• Filed: 07/19/1996
• Issued: 05/21/2002
• Est. Priority Date: 07/21/1995
• Status: Expired due to Term

• Current Assignee: L-3 Communications Corporation (L3Harris Technologies, Inc.)
• Original Assignee: Pharmarcopeia Incorporated
• Inventors: Wadsworth, Mark V., Gooch, Roland W.
• Primary Examiner(s): Hannaher, Constantine
• Application Number:
  US08/690,274
• Time in Patent Office: 2,132 Days
• Field of Search: 250/332, 250/338.4
• US Class Current: 250/332
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: G01N 21/61 Non-dispersive gas analysers G01N21/3504 takes precedence
• CPC Class Codes: H10N 19/00 Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00

Abstract

An array of bolometers suspended over a substrate by support arms located beneath the corresponding bolometer to allow maximum fill factor in the array.

Claims

1. A radiation detector, comprising:

(a) a substrate containing circuitry;

(b) a planar array of bolometers, each of said bolometers suspended over said substrate, each of said bolometers with resistance dependent upon temperature; and

(c) each of said bolometers with a plurality of support arms supporting said each bolometer on said substrate, said support arms of width greater than the spacing between adjacent bolometers, said support arms including conductors connecting said bolometers to said circuitry with said bolometers connecting in parallel.

2. The radiation detector of claim 1, wherein:

(a) said bolometers are arranged in rows and columns; and

(b) said support arms connect to column conductors on said substrate, said column conductors under said columns of bolometers.

3. A radiation detector, comprising:

(a) a substrate containing circuitry;

(b) a plurality of bolometers, each of said bolometers suspended over said substrate, each of said bolometers with resistance dependent upon temperature; and

(c) each of said bolometers with a plurality of support arms supporting said each bolometer on said substrate, said support arms located totally between said bolometers and said substrate, spacing between adjacent pairs of said bolometers less than spacing between adjacent pairs of said support arms, and said support arms include conductors connecting said bolometers to said circuitry.

4. The radiation detector of claim 3, wherein:

(a) said bolometers are arranged in rows and columns; and

(b) said support arms connect to column conductors on said substrate, said column conductors under said columns of bolometers.

5. The radiation detector of claim 4, wherein:

(a) said bolometers are coplanar and parallel to a surface of said substrate; and

(b) each of said support arms has a portion extending parallel to an edge of said bolometer and is spaced from said bolometer.

6. The radiation detector of claim 3, wherein:

(a) said bolometers are arranged in rows and columns, with all of said bolometers in a column connected in parallel, and said columns connected in series.

7. An array of bolometers, comprising:

(a) an array of bolometers, each of said bolometers suspended over a substrate, each of said bolometers with resistance dependent upon temperature; and

(b) each of said bolometers with a plurality of support arms supporting said each bolometer on said substrate, said support arms totally between said bolometers and said substrate, spacing between adjacent pairs of said bolometers less than spacing between adjacent pairs of said support arms.

8. The array of bolometers of claim 7, wherein:

(a) said bolometers are arranged in rows and columns; and

(b) said support arms connect to column conductors on said substrate, said column conductors under said columns of bolometers.

9. The array of bolometers of claim 7, wherein:

(a) said bolometers are coplanar and parallel to a surface of said substrate; and

(b) each of said support arms has a portion extending parallel to an edge of said bolometer and is spaced from said bolometer.