Fluorescent X-ray analyzing apparatus and secondary target device disposed therein
First Claim
1. A secondary target device for transferring primary X-rays generated at a primary X-ray source to a sample as secondary X-rays, comprising:
- a target main body including a plurality of target members having target surfaces facing a central axis linking between the primary X-ray source and the sample, and secondary target materials formed on the target surfaces, said plurality of target members being disposed concentrically with respect to the central axis to be spaced apart from each other, each of the target members having a length in a direction along the central axis and a disposition interval relative to a target member adjacent thereto to satisfy a first condition for allowing the primary X-rays to enter the target surface and a second condition for allowing the secondary X-rays generated at the target members by incidence of the primary X-rays to enter the sample, and an X-ray blocking member disposed on the central axis for blocking an irradiation of the primary X-rays from the primary X-ray source to the sample.
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Accused Products
Abstract
A fluorescent X-ray analyzing apparatus includes a secondary target device therein. The secondary target device includes a target main body, and an X-ray blocking member for preventing an irradiation of primary X-rays from a X-ray source to a sample. The target main body is formed of plural target members in which secondary target materials are formed on at least target surfaces facing a central axis, and the target members are arranged concentrically to have different distances from the central axis. Accordingly, the primary X-rays do not pass through a space between the target members, and are irradiated only at the target surfaces of the target members. The secondary X-rays from the target surfaces pass through the space between the target members, and reach the sample.
19 Citations
12 Claims
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1. A secondary target device for transferring primary X-rays generated at a primary X-ray source to a sample as secondary X-rays, comprising:
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a target main body including a plurality of target members having target surfaces facing a central axis linking between the primary X-ray source and the sample, and secondary target materials formed on the target surfaces, said plurality of target members being disposed concentrically with respect to the central axis to be spaced apart from each other, each of the target members having a length in a direction along the central axis and a disposition interval relative to a target member adjacent thereto to satisfy a first condition for allowing the primary X-rays to enter the target surface and a second condition for allowing the secondary X-rays generated at the target members by incidence of the primary X-rays to enter the sample, and an X-ray blocking member disposed on the central axis for blocking an irradiation of the primary X-rays from the primary X-ray source to the sample. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A fluorescent X-ray analyzing apparatus, comprising:
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a primary X-ray source for generating primary X-rays, a secondary target device for receiving the primary X-rays and providing fluorescent X-rays to a sample, said secondary target device including a target main body located near the primary X-ray source, and an X-ray blocking member disposed on a central axis linking between the primary X-ray source and the sample to prevent the primary X-rays from the primary X-ray source from being irradiated to the sample, said target main body including a plurality of target members having target surfaces facing the central axis and secondary target materials formed on the target surfaces, said plurality of target members being disposed concentrically with respect to the central axis to be spaced apart from each other, each of the target members having a length in a direction along the central axis and a disposition interval relative to a target member adjacent thereto to satisfy a first condition for allowing the primary X-rays to enter the target surface and a second condition for allowing the secondary X-rays generated at the target members by incidence of the primary X-rays to enter the sample, and an X-ray detector for detecting fluorescent X-rays generated from the sample. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification