Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators

• US 6,397,776 B1
• Filed: 06/11/2001
• Issued: 06/04/2002
• Est. Priority Date: 06/11/2001
• Status: Expired due to Term

• Current Assignee: Sabic Innovative Plastics IP BV (Government of Saudi Arabia)
• Original Assignee: General Electric Company
• Inventors: Johnson, James Neil, Browall, Kenneth Walter, Morrison, William Arthur, Iacovangelo, Charles Dominic, Yang, Barry Lee-Mean, Gasworth, Steven Marc
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US09/681,820
• Time in Patent Office: 358 Days
• Field of Search: 118/723.R, 118/723.VE, 118/723.CB, 118/723.EB, 118/723.MP, 118/719, 118/718, 156/345, 204/298.06, 204/298.23, 204/298.25, 204/298.26, 204/298.35, 204/298.36
• US Class Current: 118/723.0MP
• CPC Class Codes: C23C 16/401 containing silicon
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H05H 1/44 using more than one torch

Abstract

Chemical vapor deposition is performed using a plurality of expanding thermal plasma generating means to produce a coating on a substrate, such as a thermoplastic and especially a polycarbonate substrate. The substrate is preferably moved past the generating means. Included are methods which coat both sides of the substrate or which employ multiple sets of generating means, either in a single deposition chamber or in a plurality of chambers for deposition of successive coatings. The substrate surfaces spaced from the axes of the generating means are preferably heated to promote coating uniformity.

Claims

1. A substrate coating apparatus comprising:

a deposition chamber adapted to be maintained at subatmospheric pressure;

support means in said deposition chamber for a substrate, said substrate having at least one surface; and

a set of expanding thermal plasma generating means associated with said deposition chamber, said generating means being adapted to deposit a coating on said substrate, said set comprising at least two of said means, each of said means producing a plasma plume having a central axis, wherein said central axes of said plasma plumes produced by all of said means in said set are oriented parallel to each other.

2. The apparatus according to claim 1, wherein the expanding thermal plasma generating means are wall-stabilized DC arc generators.

3. The apparatus according to claim 1, wherein said expanding thermal plasma generating means are within said deposition chamber.

4. The apparatus according to claim 3, wherein the expanding thermal plasma generating means are in a straight line parallel to the plane of motion of the substrate support means, and with the center axes of the plasma plumes produced by said expanding thermal plasma generating means oriented perpendicular to the plane of motion of the substrate support means.

5. The apparatus according to claim 3, wherein the expanding thermal plasma generating means are in a zigzag configuration in a plane parallel to the plane of motion of the substrate support means, and with the center axes of the plasma plumes produced by said expanding thermal plasma generating means oriented perpendicular to the plane of motion of the substrate support means.

6. The apparatus according to claim 5, wherein an angle between successive lines leading from one expanding thermal plasma generating means to the next is in the range of 10-80°

.

7. The apparatus according to claim 1, wherein said expanding thermal plasma generating means are outside but in communication with said deposition chamber.

8. The apparatus according to claim 1, further comprising a movement actuator adapted to move the substrate support means past said set of expanding thermal plasma generating means.

9. The apparatus according to claim 1, wherein the substrate support means is a hook, frame, arm or clamp.

10. The apparatus according to claim 1, wherein the substrate support means is a flat panel adapted to provide support for the entire substrate.

11. The apparatus according to claim 1, further comprising a shutter in said deposition chamber between said substrate support and said expanding thermal plasma generating means, said shutter containing one or more apertures configured so as to allow overlapping of adjacent plasma plumes but block low power edge portions of said plumes.

12. The apparatus according to claim 1, further comprising at least one temperature control means located and adapted to heat or cool substrate regions spaced from the center axes of the expanding thermal plasma generating means.

13. The apparatus according to claim 12, wherein said temperature control means are heating means.

14. The apparatus according to claim 12, wherein said temperature control means are located on either side of and between the expanding thermal plasma generating means.

15. The apparatus according to claim 14, wherein said temperature control means are located upstream, with respect to movement of the substrate support means, from the expanding thermal plasma generating means.

16. The apparatus according to claim 1, wherein the expanding thermal plasma generating means are located such that anodes thereof are at a distance of 20-40 cm from the substrate.

17. The apparatus according to claim 16, wherein the expanding thermal plasma generating means are spaced so that their center axes are about 10-21 cm apart.

18. The apparatus according to claim 1, wherein the apparatus comprises a plurality of sets of expanding thermal plasma generating means, located to deposit coatings on more than one side of the substrate.

19. The apparatus according to claim 1, wherein the apparatus comprises a plurality of sets of expanding thermal plasma generating means, located to deposit successive coatings on the substrate.

20. The apparatus according to claim 1, wherein locations and configurations of said expanding thermal plasma generating means are adapted to deposit a coating on the curved substrate.

21. The apparatus according to claim 1, wherein the apparatus comprises a plurality of deposition chambers and sets of expanding thermal plasma generating means, for deposition of plural coating layers on the substrate.

22. A substrate coating apparatus comprising:

a plurality of deposition chambers, each of said chambers adapted to be maintained at subatmospheric pressure;

support means adapted to convey a substrate through said deposition chambers in succession;

a movement actuator adapted to move said substrate support means and substrate through said deposition chambers in succession;

a plurality of sets of expanding thermal plasma generating means associated with said deposition chambers, said generating means being adapted to deposit a coating on said substrate, each of said sets comprising at least two of said means, each of said means producing a plasma plume having a central axis, wherein said central axes of said plasma plumes produced by all of said means in each of said sets are oriented parallel to each other;

said generating means in each set being oriented in a straight line or a zigzag configuration, said line or configuration being parallel to the plane of motion of the substrate support means, and said generating means being located such that anodes thereof are at a distance of about 20-40 cm from the substrate and spaced so that their center axes are about 10-21 cm apart; and

heating means located and adapted to heat substrate regions spaced from the center axes of said generating means.

23. The apparatus according to claim 22, wherein a plurality of sets of expanding thermal plasma generating means are located to deposit coatings on more than one side of the substrate.