Measurement method and apparatus

  • US 6,403,966 B1
  • Filed: 06/25/1999
  • Issued: 06/11/2002
  • Est. Priority Date: 07/02/1998
  • Status: Expired due to Term
First Claim
Patent Images

1. A measurement device comprising:

  • ultraviolet laser light generating means for generating ultraviolet laser light by wavelength conversion of laser light from a solid-state laser light source; and

    measurement means for measuring the structure of an object for measurement by heterodyne detection or homodyne detection employing said ultraviolet laser light.

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