Contact structure

  • US 6,404,480 B2
  • Filed: 12/12/2000
  • Issued: 06/11/2002
  • Est. Priority Date: 03/27/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. An active matrix display device comprising:

  • a first substrate;

    a first interlayer insulating film provided over said first substrate;

    a first conductive film provided on said first interlayer insulating film;

    a second interlayer insulating film provided on said first conductive film, said second interlayer insulating film having at least two openings;

    a second conductive film provide on said second interlayer insulating film and in said openings;

    a second substrate opposed to said first substrate;

    a third conductive film provided on said second substrate; and

    a plurality of conductive spacers held between said first substrate and said second substrate;

    wherein said first conductive film is connected with said second conductive film in said openings;

    wherein at least one of said conductive spacers is held over said second interlayer insulating film and in contact with both said second conductive film and said third conductive film.

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