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Temperature control of CVD method for reduced haze

  • US 6,413,579 B1
  • Filed: 01/27/2000
  • Issued: 07/02/2002
  • Est. Priority Date: 01/27/2000
  • Status: Expired due to Fees
First Claim
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1. A method of producing a coated glass substrate having a low haze comprising:

  • a) providing a soda-lime glass substrate having at least one surface upon which a coating may be deposited;

    b) heating the surface of the glass substrate to more than 1260°

    F. to volatilize salts that may form during application of a first coating;

    c) directing a first gaseous precursor mixture including at least a halogen containing precursor and a metal precursor toward and along the surface to be coated and reacting the mixture at or near the surface while the surface is at a temperature of more than 1260°

    F. to form the first coating;

    d) cooling the surface of the coated glass substrate to less than 1200°

    F.; and

    e) directing a second gaseous precursor mixture including at least a metal precursor toward and along the coated surface of the glass substrate and reacting the mixture at or near the coated surface to form a metal containing coating.

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