Temperature control of CVD method for reduced haze
First Claim
1. A method of producing a coated glass substrate having a low haze comprising:
- a) providing a soda-lime glass substrate having at least one surface upon which a coating may be deposited;
b) heating the surface of the glass substrate to more than 1260°
F. to volatilize salts that may form during application of a first coating;
c) directing a first gaseous precursor mixture including at least a halogen containing precursor and a metal precursor toward and along the surface to be coated and reacting the mixture at or near the surface while the surface is at a temperature of more than 1260°
F. to form the first coating;
d) cooling the surface of the coated glass substrate to less than 1200°
F.; and
e) directing a second gaseous precursor mixture including at least a metal precursor toward and along the coated surface of the glass substrate and reacting the mixture at or near the coated surface to form a metal containing coating.
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Accused Products
Abstract
The invention is a method of making a coated glass substrate having a low haze. A soda-lime glass substrate having at least one surface upon which a coating may be deposited is provided. The glass substrate is heated and maintained at a temperature sufficient to volatilize salts that may be formed during the depositing of a first coating on the glass substrate. A first gaseous precursor mixture including a halogen containing precursor, a metal precursor, an oxidizing agent, and an inert to carrier gas is directed toward and along the surface to be coated and reacting the mixture at or near the surface of the glass substrate to form a first coating containing a metal oxide coating. The glass substrate is cooled to a temperature to reduce crystalline growth in a second coating to be applied over the first coating. A second gaseous precursor mixture including a second metal precursor, an oxidizing agent, and an inert carrier gas is directed toward and along the coated surface of the glass substrate and reacting the mixture at or near the coated surface to form a metal containing coating. The glass substrate is cooled to an ambient temperature. The invention also includes a coated glass substrate produced in accordance with the aforementioned method.
18 Citations
13 Claims
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1. A method of producing a coated glass substrate having a low haze comprising:
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a) providing a soda-lime glass substrate having at least one surface upon which a coating may be deposited;
b) heating the surface of the glass substrate to more than 1260°
F. to volatilize salts that may form during application of a first coating;
c) directing a first gaseous precursor mixture including at least a halogen containing precursor and a metal precursor toward and along the surface to be coated and reacting the mixture at or near the surface while the surface is at a temperature of more than 1260°
F. to form the first coating;
d) cooling the surface of the coated glass substrate to less than 1200°
F.; and
e) directing a second gaseous precursor mixture including at least a metal precursor toward and along the coated surface of the glass substrate and reacting the mixture at or near the coated surface to form a metal containing coating. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of producing a coated glass substrate having a low haze comprising:
-
a) providing a soda-lime glass substrate having at least one surface upon which a coating may be deposited;
b) heating the surface of the glass substrate to more than 1260°
F. to volatilize salts that may form during application of a first coating;
c) directing a first gaseous precursor mixture including at least a halogen containing precursor and a metal precursor toward and along the surface to be coated and reacting the mixture at or near the surface while the surface is at a temperature of more than 1260°
F. to form the first coating;
d) directing an intermediate gaseous precursor mixture to including a silane containing precursor material, oxygen, and an inert carrier gas toward and along the surface to be coated and reacting the mixture at or near the surface to form a silica coating on the first coating;
e) cooling the surface of the coated glass substrate to less than 1200°
F.; and
f) directing a second gaseous precursor mixture including at least a metal precursor toward and along the coated surface of the glass substrate and reacting the mixture at or near the coated surface to form a metal containing coating;
whereby the coated glass substrate exhibits a haze of less than 2%. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification