Apparatus and processes for the massproduction of photovotaic modules

  • US 6,423,565 B1
  • Filed: 05/30/2000
  • Issued: 07/23/2002
  • Est. Priority Date: 05/30/2000
  • Status: Active Grant
First Claim
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1. A method for fabricating semiconductor layers of a photovoltaic cell, all of the steps of which are carried out in a single vacuum chamber at a constant vacuum level, the method comprising the steps of:

  • providing, in the vacuum chamber, a substrate upon which the photovoltaic cell is to be fabricated;

    heating the substrate to a desired temperature in the vacuum chamber;

    depositing one or more layers of n-type IIB/VIB semiconductor material onto a surface of the substrate in the vacuum chamber;

    depositing one or more layers of p-type IIB/VIB semiconductor material onto the one or more layers of n-type IIB/VIB semiconductor material in the vacuum chamber;

    treating the one or more layers of n-type IIB/VIB and p-type IIB/VIB semiconductor material with a halogen containing substance in the vacuum chamber; and

    forming an ohmic contact on the treated one or more layers of p-type IIB/VIB semiconductor material in the vacuum chamber by depositing a metal compound onto the treated one or more layers of p-type IIB/VIB semiconductor material and then annealing the treated one or more layers of p-type IIB/VIB semiconductor material.

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