Multilayer article and method of making by ARC plasma deposition

  • US 6,426,125 B1
  • Filed: 03/17/1999
  • Issued: 07/30/2002
  • Est. Priority Date: 03/17/1999
  • Status: Expired due to Term
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First Claim
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1. A method of depositing a plurality of layers on an article, the method comprising steps of:

  • flowing a plasma gas in a plasma generation chamber in communication with a deposition chamber, the deposition chamber having a lower pressure than the plasma generation chamber, the article being disposed in the deposition chamber;

    generating an arc in the plasma generation chamber to create a plasma, which flows into the deposition chamber;

    injecting a first material into the plasma and reacting the first material to form an interlayer on the article, the interlayer comprising a polymerized organosilicon material; and

    injecting a second material into the plasma and reacting the second material to form a second layer comprising an inorganic ultraviolet absorbing material on the interlayer, the second material comprising a gaseous reagent, wherein the interlayer has a coefficient of thermal expansion that is between that of the substrate and the second layer.

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