Magnetic-field thermal treatment apparatus capable of reducing weight and utility consumption thereof

  • US 6,433,661 B1
  • Filed: 09/21/2000
  • Issued: 08/13/2002
  • Est. Priority Date: 09/28/1999
  • Status: Expired due to Term
First Claim
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1. A magnetic-field thermal treatment apparatus adapted to carry out a thermal treatment for object members as a magnetic field is applied to the object members, comprising:

  • a depressurized chamber receiving the object members, a heater adapted to heat the object members received within the chamber, the heater being disposed around the chamber, and a superconductive magnet unit for generating magnetic field, the object members formed of plural sheets of substrate-like members being held in a substrate holder and retained in the chamber so that surfaces of the substrates become horizontal, the superconductive magnetic unit having at least one pair of superconductive coils disposed vertically in an opposed state with the chamber therebetween, in such a manner that the magnetic field parallel to the surfaces of the substrate-like members to be treated is exerted on the substrate-like members, the apparatus further comprising a cover member and wherein;

    the chamber is formed of a silica tube provided so as to extend vertically and connected to a vacuum pumping system, the chamber operable to be opened and closed at an upper portion thereof by and with the cover member, the cover member being provided with a rotary drive unit having a rotary shaft extending into the interior of the chamber through the cover member, the substrate holder being fixed to the rotary shaft, the apparatus being further provided with a vertical drive unit adapted to move the substrate holder to the exteriorly of the chamber by vertically moving the cover member with the rotary drive unit and the substrate holder.

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