Gas panel

• US 6,435,215 B1
• Filed: 08/23/2001
• Issued: 08/20/2002
• Est. Priority Date: 10/30/1996
• Status: Expired due to Term

• Current Assignee: Ichor Systems, Inc. (ICHOR Holdings, Ltd.)
• Original Assignee: Unit Instruments, Inc. (Siemens AG)
• Inventors: Redemann, Eric J., Vu, Kim N.
• Primary Examiner(s): FOX, JOHN C
• Application Number:
  US09/939,487
• Publication Number:
  US 20020046775A1
• Time in Patent Office: 362 Days
• Field of Search: 137/269, 137/271, 137/597, 137/613, 137/884
• US Class Current: 137/884
• CPC Class Codes: C23C 16/44 characterised by the method of coating C23C16/04 takes precedence
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: Y10T 137/4259 With separate material addition
• CPC Class Codes: Y10T 137/5109 Convertible
• CPC Class Codes: Y10T 137/5283 Units interchangeable between alternate locations
• CPC Class Codes: Y10T 137/87885 Sectional block structure
• CPC Class Codes: Y10T 137/87917 Flow path with serial valves and/or closures

Abstract

A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

Claims

1. A gas panel comprising:

a first manifold having an inlet and an outlet accessing a common surface of the first manifold, and a fluid passageway connecting the inlet of the first manifold to the outlet of the first manifold and defining from the inlet of the first manifold to the outlet of the first manifold a generally lateral first flow direction;

a second manifold having an inlet and an outlet accessing a common surface of the second manifold, and a fluid passageway connecting the inlet of the second manifold to the outlet of the second manifold and defining from the inlet of the second manifold to the outlet of the second manifold a generally lateral second flow direction; and

a bridging component having an inlet and an outlet accessing a common surface of the bridging component, and a fluid passageway connecting the inlet of the bridging component to the outlet of the bridging component and defining from the inlet of the bridging component to the outlet of the bridging component a generally lateral third flow direction;

wherein the inlet of the bridging component is fluidly connected to the outlet of the first manifold and the outlet of the bridging component is fluidly connected to the inlet of the second manifold, and the third flow direction is generally transverse to the first flow direction.

2. The gas panel of claim 1, wherein the bridging component is an active component.

3. The gas panel of claim 2, wherein the active component is a valve.

4. The gas panel of claim 1, wherein the bridging component is a connector block.

5. The gas panel of claim 1, wherein the third flow direction is generally transverse to the second flow direction.

6. A gas panel comprising:

a first manifold having an inlet and an outlet accessing a common surface of the first manifold, and a fluid passageway connecting the inlet of the first manifold to the outlet of the first manifold and defining from the inlet of the first manifold to the outlet of the second manifold a generally lateral first flow direction;

a second manifold having an inlet and an outlet accessing a common surface of the second manifold, and a fluid passageway connecting the inlet of the second manifold to the outlet of the second manifold and defining from the inlet of the second manifold to the outlet of the second manifold a generally lateral second flow direction; and

a bridging component having an inlet and an outlet accessing a common surface of the bridging component, and a fluid passageway connecting the inlet of the bridging component to the outlet of the bridging component and defining from the inlet of the bridging component to the outlet of the bridging component a generally lateral third flow path;

wherein the inlet of the bridging component is fluidly connected to the outlet of the first manifold, and the outlet of the bridging component is fluidly connected to the inlet of the second manifold, and the third flow direction is aligned with the first flow direction.

7. The gas panel of claim 6, wherein the bridging component is an active component.

8. The gas panel of claim 7, wherein the active component is a mass flow controller.

9. The gas panel of claim 7, wherein the active component is a valve.

10. The gas panel of claim 6, wherein the bridging component is a connector block.

11. The gas panel of claim 6, wherein the second flow direction is aligned with the third flow direction.

12. The gas panel of claim 11, wherein the active component is a mass flow controller.

13. A gas panel comprising:

a first manifold having an inlet and an outlet accessing a common surface of the first manifold, and a fluid passageway connecting the inlet of the first manifold to the outlet of the first manifold and defining from the inlet of the first manifold to the outlet of the first manifold a generally lateral first flow direction;

a second manifold having an inlet and an outlet accessing a common surface of the second manifold, and a fluid passageway connecting the inlet of the second manifold to the outlet of the second manifold and defining from the inlet of the second manifold to the outlet of the second manifold a generally lateral second flow direction; and

an active component having an inlet and an outlet accessing a common surface of the active component, and a fluid passageway connecting the inlet of the active component to the outlet of the active component and defining from the inlet of the active component to the outlet of the active component a generally lateral third flow direction;

wherein the inlet of the active component is adapted to directly mate to the outlet of the first manifold and the outlet of the active component is adapted to directly mate to the inlet of the second manifold.

14. The gas panel of claim 13, wherein the active component is a valve.

15. The gas panel of claim 13, wherein the active component is a mass flow controller.

16. The gas panel of claim 13, wherein the inlet of the active component is adapted to directly mate from a first direction to the outlet of the first manifold.