Electrostatic discharge protection for sensors

  • US 6,440,814 B1
  • Filed: 12/30/1998
  • Issued: 08/27/2002
  • Est. Priority Date: 12/30/1998
  • Status: Expired due to Term
First Claim
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1. A method of forming an electrostatic discharge device, comprising:

  • forming a composite protection layer between and over a plurality of conductive plates which form capacitors with an object when the object is placed on a sensing surface proximate to the conductive plates for capacitive sensing of features of the object, wherein the protection layer isolates the conductive plates and protects the conductive plates from damage, and wherein the protection layer comprises a dielectric region between and over the plurality of conductive plates and an electrostatic discharge region overlying at least part of the dielectric region, at least a portion of the protection layer having an opening therethrough over at least one of the conductive plates.

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