Planar motor with linear coil arrays
First Claim
1. A planar electric motor comprising:
- a magnet array generating magnetic fields of alternating polarity; and
a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from said first shape and extending longitudinally in a second direction generally orthogonal to said first direction, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction.
1 Assignment
0 Petitions
Accused Products
Abstract
A planar electric motor comprising a magnet array having a plurality of magnets with magnetic fields of alternating polarity and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array. The coil array includes a first linear coil array having a plurality of polygonal shaped coils extending longitudinally in a first direction, and a second linear coil array having a plurality of oval shaped coils extending longitudinally in a second direction generally orthogonal to said first direction. The motor is for use in moving a stage within an exposure apparatus having an optical system for imaging a pattern formed in a reticle onto an article supported by the stage.
200 Citations
41 Claims
-
1. A planar electric motor comprising:
-
a magnet array generating magnetic fields of alternating polarity; and
a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from said first shape and extending longitudinally in a second direction generally orthogonal to said first direction, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
-
17. An exposure apparatus comprising:
-
a frame;
an optical system for forming an image on an article, the optical system being mounted on the frame;
a base positioned below the optical system;
a stage positioned adjacent to the base and configured for supporting the article, the stage being movable relative to the base and the optical system; and
an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from the first shape and extending longitudinally in a second direction generally orthogonal to said first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array connected to the base, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 40, 41)
-
-
30. A stage positioning system comprising:
-
a stage movable relative to a stationary base in a first direction, and a second direction generally orthogonal to the first direction; and
an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils extending longitudinally in the first direction, and a second coil array having a plurality of coils extending longitudinally in the second direction, individual coil of the first coil array having a length smaller than a length of the stage in the first direction and individual coil of the second coil array having a length greater than a length of the stage in the second direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37)
-
-
38. A stage positioning system comprising:
-
a stage movable relative to a stationary base in a first direction, and a second direction generally orthogonal to the first direction; and
an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils extending longitudinally in the first direction, and a second coil array having a plurality of coils extending longitudinally in the second direction, the length of the individual coil of the second coil array in the second direction being greater than the length of the individual coil of the first coil array in the first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array. - View Dependent Claims (39)
-
Specification