Method of manufacturing spatial light modulator and electronic device employing it

• US 6,452,712 B2
• Filed: 06/29/2001
• Issued: 09/17/2002
• Est. Priority Date: 12/01/1995
• Status: Expired due to Fees

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Yotsuya, Shinichi, Koeda, Hiroshi, Atobe, Mitsuro
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US09/895,694
• Publication Number:
  US 20010055146A1
• Time in Patent Office: 445 Days
• Field of Search: 359/290, 359/291, 359/292, 359/295, 353/31, 353/37
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Claims

1. A projector comprising:

a light source that emits light;

at least one modulation device that modulates the light emitted from said light source, said at least one modulation device comprising;

a plurality of micromirrors each of which has a reflective layer on a front surface that reflects the light;

a plurality of pillars that support said plurality of micromirrors at a back surface opposite to said front surface having said reflective layer; and

a plurality of electrodes that drive said plurality of micromirrors by a coulomb force; and

a projection lens that projects the light modulated by said at least one modulation device.

2. The projector of claim 1, further comprising a color filter located between said light source and said modulation device.

3. The projector of claim 2, wherein said color filter is a rotary color filter.

4. The projector of claim 1, further comprising a separating prism for separating the light into at least two wavelength regions.