Method and apparatus for automating a microelectric manufacturing process
First Claim
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1. A method of automating a manufacturing process, said method comprising the steps of:
- providing an application object, the application object implementing a domain knowledge for equipment used in the manufacturing process; and
implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.
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Abstract
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.
134 Citations
30 Claims
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1. A method of automating a manufacturing process, said method comprising the steps of:
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providing an application object, the application object implementing a domain knowledge for equipment used in the manufacturing process; and
implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
interacting with the workflow by designing the workflow using a computer system, the computer system having a computer program containing a highest architectural tier and a lower architectural tier for automating the manufacturing process, the user interacting only with the highest architectural tier, the highest architectual tier containing the workflow to implement a standard operating procedure for the manufacturing process.
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4. The method of claim 3 wherein said computer program further includes:
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a second highest architectural tier having an activity client;
a third highest architectural tier having an application object, said application object operable to be invoked by said activity client; and
a fourth highest architectural tier having an interface component, said interface component in communication with said application object and said lower architectural tier.
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5. The method of claim 1, wherein the manufacturing process is a process for manufacturing a semiconductor device.
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6. The method of claim 1, wherein the manufacturing process is a process for manufacturing a flat panel display device.
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7. The method of claim 1, wherein the manufacturing process is a process for manufacturing a disk drive device.
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8. The method of claim 1, wherein said providing step further comprises the steps of:
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interfacing by a user with a computer system to provide equipment information;
storing the equipment information in a database configuration table;
interfacing by the user with the computer system to provide an activity information;
interfacing by the user with the computer system to provide virtual factory equipment interface commands for the activity information;
interfacing by the user with the computer to provide manufacturing execution system parameters to the computer system; and
interfacing by the user with the computer system to provide an event that activates the workflow.
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9. The method of claim 8, wherein the event is selected from a group consisting of a pod arrival event, a main batch control start event, a main batch control complete event and a pod removal event.
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10. The method of claim 1, wherein the implementing step further comprises the steps of:
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designing the workflow by a user; and
registering the workflow using a workflow engine.
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11. The method of claim 10, wherein said designing step further comprises the steps of:
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choosing an activity to be performed in the manufacturing process; and
placing the activity into the workflow to provide the sequence of steps of the manufacturing process.
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12. A computer readable medium having a computer program stored thereon, that, when loaded into a computer, causes the computer to perform a function of automating a manufacturing process, the computer automating the manufacturing process by performing the steps of:
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providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process; and
implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.
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13. An apparatus for automating a manufacturing process, comprising:
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a storage device, said storage device containing a computer program for automating the process by performing the steps of;
providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process; and
implementing a workflow using the application object, the workflow representing a sequence of steps of said microelectronic manufacturing process;
a display device for interfacing with the computer program;
an interfacing device for interfacing with the computer program; and
a processing device for executing said computer program.
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14. A method of automating a manufacturing process, the method comprising the steps of:
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providing an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process; and
implementing a workflow, the workflow representing a sequence of steps of the manufacturing process. - View Dependent Claims (15, 16, 17, 18, 19, 20, 24)
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21. An electronic signal comprising a computer program wherein the electronic signal contains instructions that perform a method for automating manufacturing process, the method comprising the steps of:
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configuring an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process; and
implementing a workflow, the workflow representing a sequence of steps of the manufacturing process. - View Dependent Claims (22, 23, 25, 26)
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27. A method of automating a microelectronic manufacturing process comprising the steps of:
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(a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool;
(b) configuring the application object for a specific process tool; and
(c) performing a workflow having a sequence of steps in a microelectronic manufacturing process using a version of the process tool and the application object configured in said step (b). - View Dependent Claims (28)
(1) creating a workflow by a user; and
(2) registering the workflow using a workflow engine.
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29. A method of automating a manufacturing process comprising the steps of:
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(a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool;
(b) configuring the application object for a specific process tool; and
(c) providing a sequence of steps in a manufacturing process using a version of the process tool and the application object configured in said step (b). - View Dependent Claims (30)
(1) creating a workflow, the sequence of steps derived from the workflow; and
(2) registering the workflow using a workflow engine.
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Specification